Nanowire lasers are integrated with planar waveguide devices using a high positional accuracy microtransfer printing technique. Direct nanowire to waveguide coupling is demonstrated, with coupling losses as low as −17 dB, dominated by mode mismatch between the structures. Coupling is achieved using both end-fire coupling into a waveguide facet, and from nanowire lasers printed directly onto the top surface of the waveguide. In-waveguide peak powers up to 11.8 μW are demonstrated. Basic photonic integrated circuit functions such as power splitting and wavelength multiplexing are presented. Finally, devices are fabricated on a mechanically flexible substrate to demonstrate robust coupling between the on-chip laser source and waveguides under significant deformation of the system.

中文翻译：

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半导体纳米线激光器与聚合物波导器件在机械柔性基板上的集成

纳米线激光器使用高位置精度的微转移印刷技术与平面波导设备集成在一起。演示了直接纳米线与波导的耦合，耦合损耗低至-17 dB，主要受结构之间的模式失配影响。使用射入波导端面的端射耦合以及直接印刷在波导顶面上的纳米线激光器来实现耦合。波导内的峰值功率高达11.8μW。介绍了基本的光子集成电路功能，例如功率分配和波长复用。最后，将设备制造在机械柔性基板上，以证明在系统严重变形下，片上激光源与波导之间的牢固耦合。