Developed from soft lithography, replica molding has been proven to be a good method to prepare micron- and submicron-sized features. However, the fidelity of the features can be compromised by incomplete feature cavity filling and feature shrinkage during the forming process. In this study, centrifuge-aided micromolding is developed to prepare micron- and submicron-sized ZnO features. By introducing a centrifugal force, the shear-thinning behavior of the suspensions is utilized, and the cavity filling process and the diffusion of trapped air out of the features are accelerated. The drying shrinkage is decreased by increasing the density of the wet nanoparticle packing from the centrifugal process. The centrifugal force improves the fidelity of all the designed features. ZnO ridges from 0.4 μm to 2 μm size and rods of 1.6 μm size are prepared successfully. The wide applicability of this strategy has been demonstrated by preparing ZrO₂ features via the same method.

复制模制是从软光刻技术发展而来的，它是制备微米级和亚微米级特征的好方法。但是，特征的保真度可能会因成型过程中不完整的特征腔填充和特征收缩而受到损害。在这项研究中，开发了离心辅助微成型技术以制备微米级和亚微米级的ZnO特征。通过引入离心力，利用了悬浮液的剪切稀化行为，并加快了空腔填充过程和滞留空气从特征中扩散出来的速度。通过增加离心过程中湿纳米颗粒填料的密度来降低干燥收缩率。离心力提高了所有设计特征的保真度。ZnO脊的尺寸为0.4μm至2μm，棒为1。成功准备了6μm的尺寸。制备ZrO证明了该策略的广泛适用性_2个功能通过相同的方法。