Abstract Zr 1−x Mo x thin films were synthesized on glass substrates by co-sputtering molybdenum and zirconium targets in the presence of argon with x in the 0.32–0.95 range. From X-ray diffraction analyses and transmission electron microscopy images it was possible to observe an evolution of the samples structure from a nano-crystalline solid solution of Zr in the bcc lattice of Mo to clusters of Zr(Mo) nano-crystalline in an amorphous matrix. The coherence length deduced from X-ray diffractograms was around 1 nm–8 nm depending on the composition. Mechanical measurements show that the films exhibited high hardness H , low Young's modulus E and therefore high H ∕ E ratio compared with the bulk of Zr and Mo. We also found a low friction coefficient values for all the samples. Finally, an inverse Hall-Petch effect was observed for coherence length lower than 6 nm.

中文翻译：

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Zr 1−x Mo x 薄膜的结构和机械性能：从纳米晶态到非晶态

摘要 Zr 1-x Mo x 薄膜是在氩气存在下通过共溅射钼和锆靶材在玻璃基板上合成的，x 在 0.32-0.95 范围内。从 X 射线衍射分析和透射电子显微镜图像中，可以观察到样品结构从 Mo 的 bcc 晶格中的 Zr 纳米晶固溶体到无定形中的 Zr(Mo) 纳米晶簇的演变矩阵。从 X 射线衍射图推导出的相干长度约为 1 nm-8 nm，具体取决于成分。机械测量表明，与大量 Zr 和 Mo 相比，薄膜表现出高硬度 H 、低杨氏模量 E，因此具有高 H ∕ E 比。我们还发现所有样品的摩擦系数值都较低。最后，