Abstract Homoepitaxy on vicinal surfaces may proceed by either step-flow or step-bunching growth. This surface morphology transition is correlated with the inverse Ehrlich-Schwoebel barrier and the terrace width on the vicinal surface. We discuss a growth model based on the surface diffusion theory of Burton, Cabrera, Frank, and Schwoebel to account for conditions inducing the morphology transition. Based on a Monte-Carlo method, the transition conditions of the diffusion model are investigated regarding the inverse Ehrlich-Schwoebel barrier, the diffusion length, the vicinal terrace width, and the adatom mean resident time. This provides insights into crucial parameters and allows to predict the growth morphology by correlating theory and growth parameters. The theoretical results are applied to control the homoepitaxial growth of AlN.

中文翻译：

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控制阶梯流生长和阶梯聚束生长之间的形态转变

摘要 邻面上的同质外延可以通过阶梯流或阶梯聚束生长进行。这种表面形态转变与逆 Ehrlich-Schwoebel 势垒和邻近表面的阶地宽度相关。我们讨论了基于 Burton、Cabrera、Frank 和 Schwoebel 的表面扩散理论的生长模型，以解释导致形态转变的条件。基于Monte-Carlo方法，研究了扩散模型的过渡条件，包括反Ehrlich-Schwoebel势垒、扩散长度、邻近阶地宽度和吸附原子平均驻留时间。这提供了对关键参数的洞察，并允许通过关联理论和生长参数来预测生长形态。理论结果用于控制AlN的同质外延生长。