Large-scale, all polycrystalline diamond structures transferred onto flexible Parylene-C films for neurotransmitter sensing,Lab on a Chip

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Large-scale, all polycrystalline diamond structures transferred onto flexible Parylene-C films for neurotransmitter sensing
Lab on a Chip ( IF 6.1 ) Pub Date : 2017-08-03 00:00:00 , DOI: 10.1039/c7lc00229g
Bin Fan _{1,

2,

3,

4} , Yan Zhu _{2,

3,

4,

5} , Robert Rechenberg _{3,

4,

6} , Cory A. Rusinek _{3,

4,

6} , Michael F. Becker _{3,

4,

6} , Wen Li _{1,

2,

3,

4}

Affiliation

Boron-doped diamond (BDD) has superior electrochemical properties for bioelectronic systems. However, due to its high synthesis temperature, traditional microfabrication methods have limits to integrating BDD with emerging classes of flexible, polymer-based bioelectronic systems. This paper introduces a novel fabrication solution to this challenge, which features (i) a wafer-scale substrate transfer process with all diamond structures transferred onto a flexible Parylene-C substrate and (ii) Parylene anchors introduced to strengthen the bonding between BDD and Parylene substrates, as demonstrated by a peeling test. The electrochemical properties of the transferred BDD–polymer electrodes are evaluated using (i) an outer sphere redox couple Ru(NH₃)₆^2+/3+ to study the electron transfer process and (ii) quantitative and qualitative studies of the neurotransmitter redox couple dopamine/dopamine-o-quinone. A linear response of the BDD sensor to dopamine concentrations of 0.5 μM to 100 μM is observed (R² = 0.999) with a sensitivity of 0.21 μA cm⁻² μM⁻¹. These examples of fabricated diamond–polymer devices suggest a broad application in advanced bioelectronics and optoelectronics.

中文翻译：

大规模的所有多晶金刚石结构转移到柔性Parylene-C膜上以进行神经递质传感

掺硼金刚石（BDD）对生物电子系统具有优异的电化学性能。然而，由于其合成温度高，传统的微细加工方法在将BDD与新兴的基于聚合物的柔性生物电子系统中集成存在局限性。本文针对这一挑战介绍了一种新颖的制造解决方案，其特点是（i）晶圆级衬底转移工艺，其中所有金刚石结构均转移到柔性Parylene-C衬底上；以及（ii）引入Parylene锚以增强BDD和Parylene之间的结合如通过剥离测试所证明的。使用以下方法评估转移的BDD-聚合物电极的电化学性质：（i）外球氧化还原对Ru（NH ₃）₆^{2 + / 3 +}研究电子传递过程，以及（ii）神经递质氧化还原对多巴胺/多巴胺-邻醌的定量和定性研究。的BDD传感器的至0.5微米到100微米的多巴胺浓度具有线性响应，观察到（- [R ² = 0.999）与0.21μAcm的灵敏度^-2 μM ^-1。这些人造金刚石-聚合物器件的例子表明在先进的生物电子学和光电子学中有广泛的应用。

更新日期：2017-09-12

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