Real-time depth measurement in glow discharge optical emission spectrometry via differential interferometric profiling,Journal of Analytical Atomic Spectrometry

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Real-time depth measurement in glow discharge optical emission spectrometry via differential interferometric profiling
Journal of Analytical Atomic Spectrometry ( IF 3.1 ) Pub Date : 2017-06-21 00:00:00 , DOI: 10.1039/c7ja00146k
S. Gaiaschi _{1,

2,

3} , S. Richard _{1,

2,

3} , P. Chapon _{1,

2,

3} , O. Acher _{1,

2,

3}

Affiliation

We developed an in situ measurement technique implemented on a Glow Discharge Optical Emission Spectrometry (GD-OES) instrument, which provides the depth information during the profiling process. The setup is based on a differential interferometer, and we show that a measurement accuracy better than 5% can be obtained for crater depths ranging from 100 nanometers to several tens of micrometers. This development can be directly applied to non-transparent coatings, and brings significant improvement to the quantification process in GD-OES.

中文翻译：

辉光放电光发射光谱中通过差分干涉仪轮廓进行的实时深度测量

我们开发了一种在辉光放电光谱仪（GD-OES）上实施的原位测量技术，该技术可在分析过程中提供深度信息。该设置基于差分干涉仪，并且我们证明，对于从100纳米到几十微米的陨石坑深度，其测量精度可达到5％以上。这种发展可以直接应用于非透明涂料，并显着改善了GD-OES中的定量过程。

更新日期：2017-08-30

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