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The One‐Pot Directed Assembly of Cylinder‐Forming Block Copolymer on Adjacent Chemical Patterns for Bimodal Patterning
Macromolecular Rapid Communications ( IF 4.2 ) Pub Date : 2017-07-27 , DOI: 10.1002/marc.201700285 Tzu-Hsuan Chang 1 , Shisheng Xiong 2 , Chi-Chun Liu 2, 3 , Dong Liu 1 , Paul F. Nealey 2 , Zhenqiang Ma 1
Macromolecular Rapid Communications ( IF 4.2 ) Pub Date : 2017-07-27 , DOI: 10.1002/marc.201700285 Tzu-Hsuan Chang 1 , Shisheng Xiong 2 , Chi-Chun Liu 2, 3 , Dong Liu 1 , Paul F. Nealey 2 , Zhenqiang Ma 1
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The direct self‐assembly of cylinder‐forming poly(styrene‐block‐methyl‐methacrylate) (PS‐b‐PMMA) block copolymer is successfully assembled into two orientations, according to the underlying guiding pattern in different areas. Lying‐down and perpendicular cylinders are formed, respectively, depending on the design of chemical pattern: sparse line/space pattern or hexagonal dot array. The first chemical pattern composed of prepatterned cross‐linked polystyrene (XPS) line/space structure has a period (LS) equal to twice the intercylinder period of the block copolymer (L0). The PS‐b‐PMMA thin film on the prepared chemical template after thermal annealing forms a lying‐down cylinder morphology when the width of the PS strips is less than the width of PS block in the PS‐b‐PMMA block copolymer. The morphology is only applicable at the discrete thickness of the PS‐b‐PMMA film. In addition to forming the lying‐down cylinders directly on the XPS guiding pattern, the cylinder‐forming block copolymer can also be assembled in a perpendicular way on the second guiding pattern (the hexagonal dot array). The block copolymer films are registered into two orientations in a single directed self‐assembly process. The features of the assembled patterns are successfully transferred down to the silicon oxide substrate.
中文翻译：
用于双峰构图的相邻化学图案上的成瓶嵌段共聚物的一锅定向组装
根据不同区域的基本导向模式，可将圆柱型聚（苯乙烯嵌段-甲基丙烯酸甲酯）（PS- b - PMMA）嵌段共聚物直接自组装成功地分为两个方向。根据化学图案的设计，分别形成平躺和垂直的圆柱体：稀疏线/空间图案或六边形点阵。由预先形成图案的交联聚苯乙烯（XPS）线/空间结构组成的第一个化学图案的周期（L S）等于嵌段共聚物的柱间周期（L 0）的两倍。PS- b当PS条的宽度小于PS‐ b ‐ PMMA嵌段共聚物中PS嵌段的宽度时，热退火后所制备的化学模板上的‐PMMA薄膜会形成一个躺下的圆柱形态。形态仅适用于PS‐ b ‐ PMMA膜的离散厚度。除了直接在XPS导向图案上形成卧式圆柱体外，圆柱形成嵌段共聚物还可以垂直方式组装在第二个导向图案（六边形点阵）上。嵌段共聚物薄膜在一个定向的自组装过程中被对准两个方向。组装的图案的特征被成功地向下转移到氧化硅衬底。
更新日期：2017-07-27
中文翻译：
用于双峰构图的相邻化学图案上的成瓶嵌段共聚物的一锅定向组装
根据不同区域的基本导向模式，可将圆柱型聚（苯乙烯嵌段-甲基丙烯酸甲酯）（PS- b - PMMA）嵌段共聚物直接自组装成功地分为两个方向。根据化学图案的设计，分别形成平躺和垂直的圆柱体：稀疏线/空间图案或六边形点阵。由预先形成图案的交联聚苯乙烯（XPS）线/空间结构组成的第一个化学图案的周期（L S）等于嵌段共聚物的柱间周期（L 0）的两倍。PS- b当PS条的宽度小于PS‐ b ‐ PMMA嵌段共聚物中PS嵌段的宽度时，热退火后所制备的化学模板上的‐PMMA薄膜会形成一个躺下的圆柱形态。形态仅适用于PS‐ b ‐ PMMA膜的离散厚度。除了直接在XPS导向图案上形成卧式圆柱体外，圆柱形成嵌段共聚物还可以垂直方式组装在第二个导向图案（六边形点阵）上。嵌段共聚物薄膜在一个定向的自组装过程中被对准两个方向。组装的图案的特征被成功地向下转移到氧化硅衬底。
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