Abstract Performing electron microscopy and atom probe tomography at the same location on the same specimen combines the strengths of electron microscopy, which is primarily the analysis of defects and crystal structures, with the strengths of atom probe tomography, which is primarily the robust, accurate and sensitive three dimensional compositional analysis. This viewpoint article provides a summary of the broad range of electron microscopy techniques that have been performed on atom probe specimens to date. It describes what technique is best suited to address a specific materials science question and finishes with an outlook on possible future developments in the field.

中文翻译：

---

空间相关电子显微镜和原子探针断层扫描：当前的可能性和未来的前景

摘要 在同一样品的同一位置进行电子显微镜和原子探针断层扫描结合了电子显微镜的优势，主要是缺陷和晶体结构的分析，以及原子探针断层扫描的优势，主要是稳健、准确和灵敏的三维成分分析。这篇观点文章总结了迄今为止在原子探针标本上进行的各种电子显微镜技术。它描述了哪种技术最适合解决特定的材料科学问题，并以对该领域未来可能发展的展望结束。