Abstract With the development of portable electronics, integrated graphene microstructures and devices have attracted increasing attention due to their environment-benign, lightweight feature with small occupied area. Laser irradiation technique with advantages of rapid processing speed, large scan area and nanometer spatial resolution has been widely studied and applied in the fabrication of various nano/microstructures of graphene materials for integrated electronic applications. This review summarizes the significant advance on laser-directed design and fabrication of integrated graphene devices, along with state-of-the-art applications in microcircuits, supercapacitors, sensors, actuators, memory chips and optoelectronic devices. The perspectives and challenges in designing and improving future graphene integrated devices are also discussed.

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用于先进设备的激光照射集成石墨烯系统

摘要 随着便携式电子产品的发展，集成石墨烯微结构和器件因其环境友好、重量轻、占用面积小等特点而受到越来越多的关注。激光辐照技术具有加工速度快、扫描面积大和纳米空间分辨率等优点，已被广泛研究并应用于石墨烯材料的各种纳米/微结构的制备，以用于集成电子应用。本综述总结了集成石墨烯器件的激光导向设计和制造的重大进展，以及在微电路、超级电容器、传感器、致动器、存储芯片和光电器件中的最新应用。还讨论了设计和改进未来石墨烯集成器件的前景和挑战。