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研究领域

1. 微纳米金属薄膜结构特征与力学性能的尺度效应; 2. 微电子互连金属膜基结构的多场服役失效特性; 3. 超高真空磁控溅射制备薄膜技术; 4. 新一代原位纳米力学表征技术。

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1. Z.H. Cao, F. Wang, L Wang, X.K. Meng, Coupling effect of the electric and temperature fields on the growth of nanocrystalline copper films, Physical Review B, 81 (2010) 113405. 2. Z.H. Cao, Y.L. Huang, X.K. Meng, Size dependent rate sensitivity and plasticity of nanocrystalline Ru films, Scripta Materialia, 63 (2010) 993. 3. Z.H. Cao, P.Y. Li, H.M. Lu, Y.L. Huang, Y.C. Zhou, X.K. Meng, Indentation size effects on the creep behavior of nanocrystalline tetragonal Ta films, Scripta Materialia, 60 (2009) 415. 4. Z.H. Cao, H.M. Lu, X.K. Meng, A.H.W. Ngan, Indentation size dependent plastic deformation of nanocrystalline and ultrafine grain Cu films at nanoscale,Journal of Applied Physics, 105 (2009) 083521. Selected for inclusion in Virtual Journal of Nanoscale Science and Technology, 19 (18) 2009. 5. Z.H. Cao, K. Hu, X.K. Meng, Diffusion barrier properties of amorphous and nanocrystalline Ta films for Cu interconnects, Journal of Applied Physics, 106 (2009) 113513. 6. Z.H. Cao, K. Hu, X.K. Meng, Strain rate sensitive stretchability and fracture behavior of nanocrystalline films on flexible substrate, Materials Science and Engineering A, 536 (2012) 244. 7. Z.H. Cao, P.Y. Li, X.K. Meng, Nanoindentation creep behaviors of amorphous, tetragon- al, and bcc Ta films, Materials Science and Engineering A, 516 (2009) 253. 8. Z.H. Cao, P.Y. Li, Z.H. Jiang, X.K. Meng, Rolling deformation induced reduction of rate sensitivity and enhancement of hardness in nanocrystalline NiFe alloy, Journal of Physics D: Applied Physics, 44 (2011) 295403. 9. Z.H. Cao, P.Y. Li, H.M. Lu, Y.L. Huang, X.K. Meng, Thickness and grain size dependent mechanical properties of Cu films studied by nanoindentation tests, Journal of Physics D: Applied Physics, 42 (2009) 065405. 10. Z.H. Cao, Q.W. She, Y.L. Huang, X.K. Meng, The rate sensitivity and plastic deformation of nanocrystalline Tantalum films, Nanoscale Research Letters, 6 (2011) 186. 11. Z.H. Cao, P. Liu, X.K. Meng, S.C. Tang, H.M. Lu, In situ transmission electron microscopy observations of the crystallization of amorphous Ge films,Applied Physics A, 94 (2009) 393. 12. Z.H. Cao, H.M. Lu, X.K. Meng, Barrier layer and annealing temperature dependent microstructure evolution of nanocrystalline Cu films, Materials Chemistry and Physics,117 (2009) 321. 13. Z.H. Cao, X.K. Meng, Inverse Hall-Petch effect of hardness in nanocrystalline Ta films, Advanced Materials Research, 378-379 (2012) 575. 14. L. Wang, Z.H. Cao, J.A. Syed, K. Hu, Q.W. She, X.K. Meng, Electric field accelerating interface diffusion in Cu/Ru/TaN/Si stacks during annealing,Electrochemical and Solid-State Letters 15 (2012), H188. 15. L. Wang, Z.H. Cao, K. Hu, Q.W. She, X.K. Meng, Effects of electric field annealing on the interface diffusion of Cu/Ta/Si stacks, Applied Surface Science, 257 (2011) 10845. 16. K. Hu, Z.H. Cao, X.K. Meng, Inverse effect of thickness on the ductility in nanocrystalline Cu films, Materials Science and Engineering A, 528 (2011) 8546. 17. P.Y. Li, Z.H. Cao, Z.H. Jiang, X.K. Meng, FMAA-MS Investigation of Ni68Fe32 Nanoalloy with Sample Length Less than 30 mm, Chinese Physics Letters, 28 (2011) 086401. 18. P.Y. Li, Z.H. Cao, X.Y. Zhang, X.L. Wu, Y.N. Huang, X.K. Meng, Curie Transition of NC Nickel by Mechanical Spectroscopy and Magnetization Study,Chinese Physics Letters, 26 (2009) 036102. 19. H.M. Lu, Z.H. Cao, C.L. Zhao, P.Y. Li, X.K. Meng, Size-dependent ordering and Curie temperatures of FePt nanoparticles, Journal of Applied Physics, 103 (2008) 123526. 20. H.M. Lu, P.Y. Li, Z.H. Cao, X.K. Meng, Size-, Shape-, and Dimensionality- Dependent Melting Temperatures of Nanocrystals, Journal of Physical Chemistry C, 113 (2009) 7598.

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