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Microelectronic Engineering
基本信息
期刊名称 Microelectronic Engineering
MICROELECTRON ENG
期刊ISSN 0167-9317
期刊官方网站 https://www.sciencedirect.com/journal/microelectronic-engineering
是否OA No
出版商 Elsevier B.V.
出版周期 Monthly
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始发年份 1983
年文章数 100
最新影响因子 2.6(2023)  scijournal影响因子  greensci影响因子
中科院SCI期刊分区
大类学科 小类学科 Top 综述
工程技术3区 ENGINEERING, ELECTRICAL & ELECTRONIC 工程:电子与电气4区
NANOSCIENCE & NANOTECHNOLOGY 纳米科技4区
OPTICS 光学4区
PHYSICS, APPLIED 物理:应用4区
CiteScore
CiteScore排名 CiteScore SJR SNIP
学科 排名 百分位 5.3 0.503 0.847
Physics and Astronomy
Condensed Matter Physics
127/434 70%
Physics and Astronomy
Atomic and Molecular Physics, and Optics
68/224 69%
Engineering
Electrical and Electronic Engineering
242/797 69%
Materials Science
Electronic, Optical and Magnetic Materials
87/284 69%
Materials Science
Surfaces, Coatings and Films
42/132 68%
补充信息
自引率 3.8%
H-index 89
SCI收录状况 Science Citation Index Expanded
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PubMed Central (PMC) http://www.ncbi.nlm.nih.gov/nlmcatalog?term=0167-9317%5BISSN%5D
投稿指南
期刊投稿网址 https://www.editorialmanager.com/MEE
收稿范围
Nanotechnology and Processing — Electronics, photonics, MEMS and Life Sciences
Affiliated with iMNEs

Microelectronic Engineering is the premier journal focused on the fabrication and characterization of micro/nano-electronic materials, devices and circuits (including novel electronic nanomaterials), as well as the understanding of their working mechanisms, performance, yield, variability, stability, and reliability. The journal also focuses on the techniques that make possible the fabrication and characterization of such devices and circuits, and on the materials involved in them. Occasionally, outstanding papers on simulation of materials properties, device figures-of-merit or compact modeling of circuits and systems may be accepted. The following topics are of special interest:

Devices
Photonic and optoelectronic devices (including, sensors, actuators, phototransistors)
Transistors (including ultra-scaled, thin film, organic, ferroelectric)
Resistive switching devices (memristors, RRAM, PCRAM, FeRAM, MRAM)
Magnetic and spintronic devices
MEMS and NEMS (including power, RF, magnetic, organic)
Flexible electronic devices (including wearable, printed, paper)
Devices for energy harvesting (piezoelectric, flexoelectric, photovoltaic, solar cells)
Bioelectronic devices (molecular detection, biomimetic, diagnosis)
Device-level simulations (including variability and reliability)
Materials
Wide bandgap semiconductors
Dielectrics (low K and high K)
Two-dimensional (2D) Materials and related transferring techniques
Nanotubes, nanowires, and other nanomaterials and nanostrctures for device fabrication
Interconnects, metallization and barrier materials
New Resist Materials
Silicon on insulators
Polymers and flexible substrates, including biocompatible materials
Atomistic simulations of materials properties
Fabrication and characterization processes
Thin films deposition techniques (CVD, ALD, evaporation, sputtering, MBE, plasma)
Lithography (including optical, EUV, electron beam, nanoimpring, particle-assisted, mask less, X-ray optical methods, emerging methods and limits, as well as resists)
Pattern transfer (including ion, plasma and wet transfer, as well as transfer of 2D materials)
Integration processes (including inkjet printing, 3D printing, 3D integration)
Top-down and bottom-up self-assembly processes
Annealing and its effect in the materials (including crystallization, wrinkling, de-wetting)
Nanometrology (TEM, SEM, EDX, EELS, STM, AFM and related setups)
Circuits and applications
Sensing and actuation, including bio-compatible applications
Signal souring and transfer
Logic operations and data processing
Electronic memories and information storage
Artificial neural networks and neuromorphic computing
Compact modeling of electronic circuits
Quantum computing
Five different types of articles are considered:
Research articles that report regular original research that produces significant advancement.
Accelerated Publications (Letters) that feature exciting research breakthroughs.
Review Articles that inform readers of the latest research and advances in a topic within the broad field of microelectronic engineering. This includes roadmaps and guides proposing the recommended methods in a specific field.
Short / Technical notes intended for original limited investigations or short description of original industrial or industrially-related research and development work
News and Opinions that comment on topical issues or express views on the developments in related fields, or comment on previously published work
收录体裁
Review Articles 
Accelerated Publications
Regular papers
Short Communication
Opinion Paper
投稿指南 https://www.sciencedirect.com/journal/microelectronic-engineering/publish/guide-for-authors
投稿模板
参考文献格式 https://www.elsevier.com/journals/microelectronic-engineering/0167-9317/guide-for-authors
编辑信息
Editor-in-Chief
Dr. Evangelos Gogolides
Institute of Nanoscience and Nanotechnology, Aghia Paraskevi, 15310, Athens, Greece
Editor Special Issues

Dr. Jin-Woo Choi

Louisiana State University, Baton Rouge, Louisiana, United States
Area Editors
University of Canterbury, 8140, Christchurch, New Zealand Nanolithography, 3D Nanoimprint, BioMEMs, Bionanotechnology, Surface texturing

Dr. Joel M. Barnett

Tokyo Electron US Holdings Inc, Austin, Texas, , United States Cleaning/surface preparation
National Centre of Microelectronics, 08193, Bellaterra, Spain  - Silicon-based micro/nanosystems and sensors.- Micro/nanoelectromechanical systems (MEMS/NEMS).- Integrated sensors, CMOS sensors.- Micro/nanoelectronics technology, nanofabrication.

Professor Ahmed Busnaina

Northeastern University Center for High-rate Nanomanufacturing, 467 Egan Bldg, Boston, Massachusetts, MA 02115, United States 

Dr. Yifang Chen

Fudan University School of Information Science and Engineering, 220 Han Dan Road, 200433, Shanghai, China  Electron beam lithography, nanoimprint, nanofabrication, nanoelectronics, nanophotonics, metasurface, photoelectronic devices, X-ray optics

Dr. Vassilios Constantoudis

Institute of Nanoscience and Nanotechnology, Aghia Paraskevi, 15310, Athens, Greece Nanometrology and nanocharacterization, Scanning Probe Microscopies, Lithography and etching, Applications of Artificial Intelligence and Machine/Deep Learning techniques in Nanotechnology and Nanoelectronics

Dr. Uros Cvelbar

Jozef Stefan Institute, 1000, Ljubljana, Slovenia  Plasma processing and material characterization
University of Sherbrooke, Sherbrooke, J1K 2R1, Quebec, Canada  Plasma etching, Microelectronics, Materials characterization

Dr. Wim De Malsche

VUB University, 1050, Brussel, Belgium  Device development for microfluidics and microreactor applications
Ethniko Kentro Ereunas Physikon Epistemon 'Demokritos', 153 10, Athens, Greece  2D materials (graphene, silicene, germanene, transition metal dichalcogenides); high k gate dielectrics and high mobility semiconductors (Ge, InGaAs) for advanced CMOS; Topological insulators (characterization by ARPES)

Professor Huigao Duan

Hunan University College of Mechanical and Vehicle Engineering, College of Mechanical and Vehicle Engineering, Hunan University, 410082, Changsha, Hunan, China  Nanofabrication, Nanopatterning, Nanolithography, Nanomanufacturing, Nanophotonics, Nanoplasmonics, Sensors, Smart Structures, Microsystems.

Dr. Irene Fernandez-Cuesta

University of Hamburg, 20148, Hamburg, Germany Nanoimprint lithography, Nanooptics, Plasmonics, Nanofluidics, (bio)sensors, Single molecule detection, Device fabrication

Professor Chien-Chong Hong

National Tsing Hua University Department of Power Mechanical Engineering, No. 101, Section 2, Kuang-Fu Road, 30013, Hsinchu, Taiwan Acoustic biosensors, Point-of-care blood diagnostics, Single molecular nanopore sensing, Flexible electronics
The University of Tokyo, 113-0033, Bunkyo-Ku, Tokyo, Japan  Soft-lithography & nano fabrication, Bio-MEMS and DDS(drug delivery system), MEMS energy harvest, microneedle
Pohang University of Science and Technology Department of Mechanical Engineering, 77 Cheongam-Ro, Nam-Gu, 37673, Pohang, South Korea Polymer micro/nano-manufacturing, Cell/tissue culture platforms, Microfluidics, Organ-on-a-chip, Energy harvesting

Professor Wu LU

Ohio State University Department of Electrical and Computer Engineering, 205 Dreese Labs; 2015 Neil Avenue, Columbus, Ohio, 43210, United States Semiconductor device physics, Wide Bandgap Semiconductors, High Electron Mobility Transistors, Bipolar transistors, Biosensors, Drug and gene delivery devices

Dr. Mario Lanza

Institute of Functional Nano and Soft Materials, Suzhou, China Two-dimensional materials, Dielectric breakdown and resistive switching, Memristors for information storage and neuromorphics, Conductive atomic force microscopy

Dr. Jaejong Lee

Korea Institute of Machinery and Materials Nano-Convergence Mechanical Systems Research Division, 156 Gajeongbuk-Ro, 305-343, Daejeon, Korea, Republic of  Nanoimprint Lithography, Nanobiology devices and Nanofabrication

Dr. Sangho Lee

Korea Insitiute of Industrial Technology, Ansan-si, Republic of Korea  Printed Electronics, Lab-hip, Inkjet printing-based manufacturing process

Dr. Rodolphe Marie

Technical University of Denmark, Kogens Lyngby, Denmark Nanofluidics, microfluidics, fluorescence microscopy, lab-on-a-chip, single cell
Interuniversity Micro-Electronic Centre, 3001, Leuven, Belgium  Plasma etching

Dr. Sunggook Park

Louisiana State University Department of Mechanical & Industrial Engineering, 2514B Patrick F. Taylor Hall, Baton Rouge, Louisiana, 70803, United States  Nanoimprint lithography/nanomolding; bioMEMS/NEMS; micro/nanoscale heat transfer
Microelectronics Institute of Barcelona, E-08193, Cerdanyola del Valles, Spain  Advanced nanofabrication methods, Nanoelectromehcanical systems, Nanoelectronic devices and sensors

Dr. Edward Song

University of New Hampshire, Department of Electrical and Computer Engineering, Durham, NH 03824, United States  Biosensors, Electrochemical sensors, Aptamer-based sensors, BioMEMS, Lab-on-a-Chip, Microfluidics, Point-of-care diagnostics, Wearable devices

Professor Li Tao

Southeast University School of Materials Science and Engineering, Nanjing, China  micro/nano fabrication, 2D materials and devices, microsystems, nanoengineering and micro/nano sensors.

Dr. Guillermo Villanueva

EPFL Advanced NanoElectroMechanical Systems Laboratory, ME D2 2726 - Station 9, CH-1015, Lausanne, Switzerland 

Prof. Dr. Shaowei Wang

Shanghai Institute of Technical Physics Chinese Academy of Sciences, 188 Xinlai Rd, Jiading Qu, 201815, Shanghai Shi, China  Micro-nanophotonics devices and applications, integrated-cavities for micro-spectrometers, interaction between high-Q optical cavity and low-dimensional materials, nano laser, solar selective absorbers, metamaterial polarizers, and optical thin films

Professor Sheng-Joue Young

National Formosa University, 632, Huwei, Taiwan Nanotechnology, Optoelectronic devices, Flexible and nano devices
Advisory Editors, Europe

Professor Nuria Barniol

Autonomous University of Barcelona, Barcelona, Spain Micro and Nanoelectromechanical systems, CMOS-MEMS, RF MEMS, MEMS based sensors, MEMS/NEMS relays
Microfluidic ChipShop GmbH, Jena, Germany  Microfluidics, polymer microfabrication, commercialization of microsystems
Institute for Integrated Sensor Systems, Wiener Neustadt, Austria Magnetoelectronics/spintronics, micro- und nanoscale lithography, functional nano-objects, biomolecular diagnostics
University College Paris, Paris, France  Micro and Nano fabrication, Biomedical Devices, Nanoimprint and Nanoprint Technologies
University of Salento, Lecce, Italy  NanoPhotonics, MEMS & NEMS, Micro and Nano Fabrication

Dr. Michel Despont

CSEM Zurich, Zurich, Switzerland  Micro and nano ElectroMechanical System - M(N)EMS, Nanopatterning, Scanning probe technology

Dr. Zahid A. K. Durrani

Imperial College London, London, United Kingdom Nanometer Devices for Electronics and Optoelectronics, Dimension-sensitive Device Properties, Mesoscopic Devices, Top-Down / Bottom-Up (Self-Assembly) Nanofabrication, Nanomaterials for Device Fabrication
French Alternative Energies and Atomic Energy Commission Electronics and Information Technology Laboratory, Grenoble, France  Emerging thin film devices technologies, Nanoelectronics, CMOS, SOI, Memories, nanoelectromechanical systems (NEMS)

Dr. Maria Farsari

Foundation of Research and Technology Hellas Library, Irakleio, Greece  Multiphoton lithography, 3D printing, Laser fabrication
Institute for Microelectronics and Microsystems National Research Council, Catania, Italy Flexible and large area electronics, Thin Film Transistors, organic electronics, Laser annealing

Dr. Nikolaj Gadegaard

University of Glasgow, Glasgow, Scotland, United Kingdom Micro- and nanofabrication for biomedical appli, Nanoimprint and injection moulding replication technologies, Life science devices
University College Cork National University of Ireland, Cork, Ireland Atomic scale simulations for nano, Advanced MOS devices, Organic and molecular electronics
TU Delft, Delft, Netherlands  Focused electron beam induced processing (FEBIP), Charged particle optics, Electron-matter scattering simulations

Dr. Mervyn E. Jones

Imperial College London, London, United Kingdom  Electron beam lithography /machines/resists/ mask making, Lithography for novel optical and nano device fabrication

Professor Dieter Kern

Eberhard Karls University Tübingen, Tubingen, Germany Nanofabrication, Charged Particle Optics and Applications, Nanoelectronics and -photonics, Nanobiotechnology
University of Catania, Catania, Italy  Low-cost nanostructures, Nanosensing, Third generation photovoltaics

Dr. David Peyrade

Microelectronic Technology Laboratory, Grenoble, France  • Micro and Nano Fabrication• Life science devices• Industrial transfert

Dr. Ivo Rangelow

Ilmenau University of Technology, Ilmenau, Germany  Novel nanofabrication methods, Alternative lithography, Active scanning probes and technology,Nanodevices and nanosensors, Nanoelectromehcanical systems
Paul Scherrer Institute, Villigen, Switzerland  nanoimprint lithography, 3D lithography, LIGA technology
TU Delft, Delft, Netherlands  Instrumentation and tools for nano science, Micro fabrication techniques, Scanning Probe Microscopy
Uppsala University, Uppsala, Sweden  organs-on-chip, droplet microfluidics, lab-on-a-chip
National Technical University of Athens, Athens, Greece  nanoelectronic devices, microsystems, nanotechnology for sensors
Toulouse School of Engineering, Toulouse, France Nanopatterning, Biosystems, Lab on a chip
Advisory Editors, America

Dr. Mohamed Chaker

National Institute of Scientific Research, Quebec, Quebec, Canada  Plasma processing : etching, nanotexturing and bonding, Nanomaterials and thin films for device fabrication, Laser-assisted processing

Dr. Panos Datskos

Oak Ridge National Laboratory, Oak Ridge, Tennessee, United States  MEMS/NEMS sensors, Microfabrication, Nanostructured materials (superhydrophobic)
University of Houston, Houston, Texas, United States  Plasma Science and Engineering, Plasma Nanotechnology, Plasma Modeling and Simulation, Experimental Diagnostics and Sensors Microplasmas
University of Alberta, Edmonton, Alberta, Canada Micro/nanofabrication, micro/nanolithography, Micro/nanoelectromechanical systems, Biosensors, lab-on-a-chip, energy harvesting

Dr. Gregg Gallatin

Applied Math Solutions LLC, Newtown, Connecticut, United States  Modeling, simulation and analysis of nanofabrication techniques, processes and materials, particularly microlithography

Mr. John Hartley

Nuflare Technology America Inc, Sunnyvale, California, United States  Electron beam systems engineering, Nanoscale fabrication, Mask technology

Dr. Patrick Naulleau

E O Lawrence Berkeley National Laboratory, Berkeley, California, United States  EUV Lithography, EUV Metrology, Resist materials characterization and modeling

Professor Ian Papautsky

University of Illinois at Chicago, Chicago, Illinois, United States  microfluidic devices and systems, lab-on-a-chip, point-of-care biosensors
University of California Santa Barbara, Santa Barbara, California, United States 
University of California San Diego Department of Nanoengineering, San Diego, California, United States  Sensors and Electrochemistry
Advisory Editors, Asia-Oceania

Dr. Hsuen-Li Chen

National Taiwan University, Taipei, Taiwan  Nanometer Devices for Optoelectronics, Nanomaterials for Device Fabricati, Nanoimprint Lithography

Dr. Toshiaki Iwamatsu

Renesas Electronics Corporation, Koto-Ku, Japan  CMOS Device and Process Technology, SOI CMOS Technology
Fudan University, Shanghai, China  Nanometer devices for electronics and optoelectronics, Dielectrics (low K and high K), Nanoimprint lithography techniques and templates
Shizuoka University Research Institute of Electronics, Hamamatsu, Japan  Hamamatsu, 432-8011
National University of Singapore, Singapore, Singapore  Micro and Nano fabrication using Proton Beam Writing (PBW), Nano Imprint Lithograph (NIL) and mold fabrication, Micro & Nanofluidic lab on chip devices for single molecule detection and particle separation, Nanowire fabrication and integration

Professor Dacheng Wei

Fudan University, Shanghai, China  Nanoelectronics, organic electronics, flexible electronics


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