In 1983, the two journals, Journal of Vacuum Science and Technology A and B were launched when the original Journal of Vacuum Science and Technology was split.
JVSTB is devoted to publishing reports of original research, letters, and review articles on microelectronics and nanotechnology. The scope includes, but is not limited to, the following topics:
2-D materials
Compound semiconductor electronics and optoelectronics
Dielectrics in micro- and nanoelectronics
Graphene, carbon nanotubes, and fullerenes: materials & devices
Group IV semiconductor microelectronics
Lithography
Microelectromechanical and nanoelectromechanical systems and devices (MEMS & NEMS)
Nanometer science and nanotechnology
Nanostructured materials and devices including nanowires, nanoparticles and quantum dots, and organic and molecular electronics
Photovoltaics, batteries, and other devices for energy conversion and storage
Plasmonics
Spintronics and magnetic devices
Vacuum nanoelectronics

JVST Editorial Board
Steven L. Bernasek, Princeton University
Yves J. Chabal, University of Texas at Dallas
Vincent M. Donnelly, University of Houston
Alfred Grill, IBM T.J. Watson Research Center
Sarah R. Kurtz, National Renewable Energy Laboratory
Tadatsugu Minami, Kanazawa Institute of Technology
Stephen J. Pearton, University of Florida
R. Ramesh, Univ. of California at Berkeley
Jack Rowe, North Carolina State University
Ellen D. Williams, University of Maryland
Richard van de Sanden, Eindhoven University of Technology
Mikhail Zharnikov, Universität Heidelberg
Joshua M.O. Zide, University of Delaware