Stability and scalability have become the two main challenges for perovskite solar cells (PSCs) with the research focus in the field advancing toward commercialization. One of the prerequisites to solve these challenges is to develop a cost‐effective, uniform, and high quality electron transport layer that is compatible with stable PSCs. Sputtering deposition is widely employed for large area deposition of high quality thin films in the industry. Here the composition, structure, and electronic properties of room temperature sputtered SnO₂ are systematically studied. Ar and O₂ are used as the sputtering and reactive gas, respectively, and it is found that a highly oxidizing environment is essential for the formation of high quality SnO₂ films. With the optimized structure, SnO₂ films with high quality have been prepared. It is demonstrated that PSCs based on the sputtered SnO₂ electron transport layer show an efficiency up to 20.2% (stabilized power output of 19.8%) and a T₈₀ operational lifetime of 625 h. Furthermore, the uniform and thin sputtered SnO₂ film with high conductivity is promising for large area solar modules, which show efficiencies over 12% with an aperture area of 22.8 cm² fabricated on 5 × 5 cm² substrates (geometry fill factor = 91%), and a T₈₀ operational lifetime of 515 h.

中文翻译：

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利用室温溅射SnO2电子传输层的稳定高效钙钛矿太阳能电池和组件的可扩展制造

钙钛矿型太阳能电池（PSC）的稳定性和可扩展性已成为两大挑战，研究重点是向商业化方向发展。解决这些挑战的先决条件之一是开发一种经济，均匀，高质量的电子传输层，该层与稳定的PSC兼容。在工业中，溅射沉积被广泛用于高质量薄膜的大面积沉积。在这里，系统研究了室温溅射SnO ₂的组成，结构和电子性能。Ar和O ₂分别用作溅射气体和反应气体，并且发现高氧化环境对于形成高质量SnO ₂是必不可少的电影。通过优化的结构，可以制备出高质量的SnO ₂薄膜。结果表明，基于溅射的SnO ₂电子传输层的PSC的效率高达20.2％（稳定的输出功率为19.8％），T _80的使用寿命为625小时。此外，具有高导电性的均匀且薄的溅射SnO ₂膜有望用于大面积太阳能电池组件，在5×5 cm ^2的基板上制造22.8 cm ²的开口面积时，其效率超过12％（几何填充率= 91％）。 ），T _80的使用寿命为515小时。