Compliant mechanisms are state of the art in micropositioning stages due to their many beneficial features. However, their design usually compromises between motion range, motion accuracy and design space, while mechanisms with distributed compliance are mostly applied. The further use of flexure hinges with common notch shapes strongly limits the stroke in existing high-precision motion systems. Therefore, this paper presents a high-precision compliant XY micropositioning stage with flexure hinges capable of realizing a motion range of $\pm$ 10 mm along both axes. The stage is based on a novel plane-guidance mechanism, which is optimized to realize a precise rectilinear motion of the coupler link while keeping the rotation angles of all hinges below $5°$. The XY motion is then achieved by coupling two of these mechanisms in a serial arrangement. Next, the synthesis of the monolithic XY stage is realized by replacing all revolute joints of the rigid-body model with flexure hinges using optimized power function notch shapes. Emphasis is also placed on the embodiment design of the stage and the actuator integration to minimize possible error sources. Finally, the quasi-static behavior of the compliant stage is characterized by a simulation with a 3D FEM model and by an experimental investigation of a prototype. According to the results, the developed compliant XY micropositioning stage achieves a maximum positioning deviation of less than 10 μm in both axes and a yaw error of less than 100 μrad over a working range of 20 mm $\times$ 20 mm with a comparably compact design of the compliant mechanism of 224 mm $\times$ 254 mm.

由于其许多有益的特性，兼容机制是微定位阶段的最新技术。然而，它们的设计通常在运动范围、运动精度和设计空间之间进行折衷，而主要应用分布式柔顺机制。进一步使用具有常见凹口形状的挠性铰链极大地限制了现有高精度运动系统中的行程。因此，本文提出了一种具有挠性铰链的高精度柔性 XY 微定位平台，能够实现$\pm$沿两个轴各 10 毫米。该平台基于一种新颖的平面导向机构，该机构经过优化以实现耦合器连杆的精确直线运动，同时保持下方所有铰链的旋转角度$5°$. 然后通过以串联方式耦合这些机构中的两个来实现 XY 运动。接下来，通过使用优化的幂函数凹口形状用挠性铰链替换刚体模型的所有旋转关节来实现整体 XY 平台的合成。重点还放在平台的实施例设计和执行器集成上，以最大限度地减少可能的误差源。最后，柔性平台的准静态行为通过 3D FEM 模型的模拟和原型的实验研究来表征。根据结果​​，开发的柔性 XY 微定位平台在两个轴上实现了小于 10 μm 的最大定位偏差，并且在 20 mm 的工作范围内实现了小于 100 μrad 的偏航误差 $\times$ 20 毫米，具有 224 毫米柔顺机构的相对紧凑设计 $\times$ 254 毫米。