A $2\times 2$ high-intensity CMUT transmit array that is capable of two-dimensional beam steering is presented. The device uses an ac drive voltage at half the ultrasound frequency without any dc bias, enabling the usage of the entire gap height. The device is designed using a large signal equivalent model approach. A fabrication method that requires a single lithographic mask has been used. The fabricated devices are operated at 76 kHz to beam steer at various angles. An equivalent element pressure of 144 dB// $20~\mu $ Pa at the transducer surface was measured. The entire half-space can be steered without any sidelobes and the beam obtained from the array is in excellent agreement with the theoretical predictions. [2020-0253]

中文翻译：

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具有波束转向的高强度机载 CMUT 发射机阵列

一种 $2\乘以 2$ 提出了能够进行二维波束控制的高强度 CMUT 发射阵列。该器件使用一半超声波频率的交流驱动电压，没有任何直流偏置，从而能够使用整个间隙高度。该设备是使用大信号等效模型方法设计的。已经使用了需要单个光刻掩模的制造方法。制造的设备在 76 kHz 下运行，以各种角度进行光束控制。等效元件压力为 144 dB// $20~\mu $ 测量换能器表面的 Pa。可以在没有任何旁瓣的情况下控制整个半空间，并且从阵列获得的波束与理论预测非常一致。[2020-0253]