当前位置: X-MOL 学术ACS Photonics › 论文详情
Our official English website, www.x-mol.net, welcomes your feedback! (Note: you will need to create a separate account there.)
On-Chip Optical Gas Sensors Based on Group-IV Materials
ACS Photonics ( IF 7 ) Pub Date : 2020-11-07 , DOI: 10.1021/acsphotonics.0c00976
Jingwen Wu 1, 2 , Gongcheng Yue 1, 2 , Weicheng Chen 1, 2 , Zhengkun Xing 1, 2 , Jiaqi Wang 3 , Wei Ru Wong 4 , Zhenzhou Cheng 1, 2, 5 , Sze Yun Set 6 , Ganapathy Senthil Murugan 7 , Xingjun Wang 8 , Tiegen Liu 1, 2
Affiliation  

Compact and smart optical gas sensors have attracted significant attention over the past few decades. Among the materials used for developing such gas sensors, group-IV materials, including silicon, germanium, carbon allotropes, and their compounds, are considered the most promising candidates. By virtue of their inherent compatibility with the CMOS fabrication process in the mature microelectronics industry, on-chip optical gas sensors based on group-IV materials have merits of appreciable sensitivity and high-density integration. Moreover, such sensors have promising potential to be integrated with other electronic or photonic devices for on-chip signal processing and communication, which are expected to enable versatile applications in the internet of things, point-of-care testing, and information and communication technology. This paper is the review of basic principles, state-of-the-art devices, and cutting-edge applications of on-chip optical gas sensors based on group-IV materials and discussions of their prospects.

中文翻译:

基于IV组材料的片上光学气体传感器

在过去的几十年中,紧凑型和智能型光学气体传感器引起了广泛的关注。在用于开发此类气体传感器的材料中,IV组材料(包括硅,锗,碳同素异形体及其化合物)被认为是最有前途的候选材料。由于其与成熟的微电子工业中CMOS制造工艺的内在兼容性,基于IV组材料的片上光学气体传感器具有明显的灵敏度和高密度集成的优点。此外,此类传感器具有与其他电子或光子设备集成在一起以进行片上信号处理和通信的潜力,有望在物联网,即时检验,信息和通信技术中实现多种应用。
更新日期:2020-11-18
down
wechat
bug