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Active matrix monolithic micro‐LED full‐color micro‐display
Journal of the Society for Information Display ( IF 1.7 ) Pub Date : 2020-08-24 , DOI: 10.1002/jsid.962
Xu Zhang 1 , Longheng Qi 1 , Wing Cheung Chong 1 , Peian Li 1 , Chak Wah Tang 1 , Kei May Lau 1
Affiliation  

An active matrix monolithic micro‐LED full‐color micro‐display with a pixel density of 317 ppi is demonstrated. Starting from large‐scale and low‐cost GaN‐on‐Si epilayers, monolithic 64 × 36 blue micro‐LED arrays are fabricated and further transformed to full‐color micro‐displays by applying a photo‐patternable color conversion layer. This full‐color fabrication scheme shows feasible manufacturability, suggesting a potential for volume production of micro‐LED full‐color micro‐display.

中文翻译:

有源矩阵单片微型LED全彩微型显示器

展示了一种有源矩阵单片微LED全彩色微显示器,其像素密度为317 ppi。从大规模,低成本的GaN-on-Si外延层开始,制造出单片64×36蓝色micro-LED阵列,并通过应用可光图案化的颜色转换层将其进一步转变为全色微型显示器。这种全色制造方案显示出可行的可制造性,这表明有可能批量生产microLED全色微型显示器。
更新日期:2020-08-24
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