Vertical cavity surface-emitting lasers (VCSELs) have made indispensable contributions to the development of modern optoelectronic technologies. However, arbitrary beam shaping of VCSELs within a compact system has remained inaccessible until now. The emerging ultra-thin flat optical structures, namely metasurfaces, offer a powerful technique to manipulate electromagnetic fields with subwavelength spatial resolution. Here, we show that the monolithic integration of dielectric metasurfaces with VCSELs enables remarkable arbitrary control of the laser beam profiles, including self-collimation, Bessel and Vortex lasers, with high efficiency. Such wafer-level integration of metasurface through VCSEL-compatible technology simplifies the assembling process and preserves the high performance of the VCSELs. We envision that our approach can be implemented in various wide-field applications, such as optical fibre communications, laser printing, smartphones, optical sensing, face recognition, directional displays and ultra-compact light detection and ranging (LiDAR).

垂直腔面发射激光器（VCSEL）为现代光电技术的发展做出了不可或缺的贡献。然而，迄今为止，在紧凑型系统中对 VCSEL 进行任意光束整形仍然无法实现。新兴的超薄平面光学结构，即超表面，提供了一种强大的技术来操纵具有亚波长空间分辨率的电磁场。在这里，我们展示了介电超表面与 VCSEL 的单片集成能够以高效率对激光束轮廓进行显着的任意控制，包括自准直、贝塞尔和涡旋激光器。这种通过 VCSEL 兼容技术实现的超表面晶圆级集成简化了组装过程并保持了 VCSEL 的高性能。