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A flexible precise volume sensor based on metal-on-polyimide electrodes sandwiched by PDMS channel for microfluidic systems

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Abstract

This paper reports a flexible precise volume sensor with metal-on-polyimide (PI) electrodes to substitute for the peripheral ration pump of a microfluidic system, thus beneficial for integration and miniaturization. This in-channel volume sensor consists of multi-electrode pairs, and it can perform volume measurement of the fluid flowing through microchannels by testing the resistance variation of the electrode pairs, which makes the device possible to help automatically control the sample volume in the mixing and reacting processes inside a microfluidic chip without peripheral ration pumps. The electrode pairs of the sensor are fabricated on flexible PI surface directly by inkjet printing. Then, the electrodes with the PI substrate are transferred and sandwiched by a polydimethylsiloxane (PDMS) substrate layer and a PDMS channel layer to form the flexible precise volume sensor. This method overcomes the challenge of patterning metals on PDMS and the sandwiched PDMS–PI–PDMS structure is beneficial for integration with other PDMS-based microfluidic chips. The effects of electrode-tip shapes and numbers of the electrode pairs are also investigated. A novel calculating method is proposed to obtain more precise results when different numbers of electrode pairs are used in different situations. According to the experimental results, the more electrode pairs are used in the same spacing, the better measurement precision can be obtained. The volume sensor with optimized electrode-tip and multi-electrode pairs can detect the fluid volume in nanolitre scales with the relative error of < 0.8%. This work exhibits the potential to form a total lab-on-a-chip without peripheral ration pumps.

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References

  • Alveringh D, Wiegerink RJ, Groenesteijn J, Sanders RGP, Lotters JC (2018) Experimental analysis of thermomechanical noise in micro Coriolis mass flow sensors. Sens Actuators A Phys 271:212–216

    Article  Google Scholar 

  • Fang Y, Hester JGD, deGlee BM, Tuan C-C, Brooke PD, Le T et al (2016) A novel, facile, layer-by-layer substrate surface modification for the fabrication of all-inkjet-printed flexible electronic devices on Kapton. J Mater Chem C 4(29):7052–7060. https://doi.org/10.1039/c6tc01066k

    Article  Google Scholar 

  • Gach PC, Iwai K, Kim PW, Hillson NJ, Singh AK (2017) Droplet microfluidics for synthetic biology. Lab Chip 17(20):3388–3400

    Article  Google Scholar 

  • Gao W, Ota H, Kiriya D, Takei K, Javey A (2019) Flexible electronics toward wearable sensing. Acc Chem Res 52(3):523–533. https://doi.org/10.1021/acs.accounts.8b00500

    Article  Google Scholar 

  • Gencturk E, Mutlu S, Ulgen KO (2017) Advances in microfluidic devices made from thermoplastics used in cell biology and analyses. Biomicrofluidics 11(5):051502

    Article  Google Scholar 

  • Harada N, Hasegawa Y, Ono R, Matsushima M, Kawabe T, Shikida M (2017) Characterization of basket-forceps-type micro-flow-sensor for breathing measurements in small airway. Microsyst Technol Micro Nanosyst Inf Storage Process Syst 23(12):5397–5406

    Google Scholar 

  • Hoang MV, Chung HJ, Elias AL (2016) Irreversible bonding of polyimide and polydimethylsiloxane (PDMS) based on a thiol-epoxy click reaction. J Micromech Microeng 26(10):105019

    Article  Google Scholar 

  • Kappings V, Grun C, Ivannikov D, Hebeiss I, Kattge S, Wendland I et al (2018) vasQchip: a novel microfluidic, artificial blood vessel scaffold for vascularized 3D tissues. Adv Mater Technol 3(4):1700246

    Article  Google Scholar 

  • Kim MG, Alrowais H, Pavlidis S, Brand O (2017) Size-scalable and high-density liquid-metal-based soft electronic passive components and circuits using soft lithography. Adv Func Mater 27(3):1604466

    Article  Google Scholar 

  • Kuo JTW, Yu L, Meng E (2012) Micromachined thermal flow sensors—a review. Micromachines 3(3):550–573

    Article  Google Scholar 

  • Li Q, Sun LH, Zhang L, Xu ZG, Kang YJ, Xue P (2018) Polydopamine-collagen complex to enhance the biocompatibility of polydimethylsiloxane substrates for sustaining long-term culture of L929 fibroblasts and tendon stem cells. J Biomed Mater Res Part A 106(2):408–418

    Article  Google Scholar 

  • Okamoto S, Ukita Y (2017) Autonomous and complex flow control involving multistep injection and liquid replacement in a reaction chamber on steadily rotating centrifugal microfluidic devices. Rsc Adv 7(57):35869–35874

    Article  Google Scholar 

  • Osaki T, Shin Y, Sivathanu V, Campisi M, Kamm RD (2018) In vitro microfluidic models for neurodegenerative disorders. Adv Healthc Mater 7(2):1700489

    Article  Google Scholar 

  • Phan H-P, Zhong Y, Nguyen T-K, Park Y, Dinh T, Song E et al (2019) Long-Lived, Transferred Crystalline Silicon Carbide Nanomembranes for Implantable Flexible Electronics. ACS Nano. https://doi.org/10.1021/acsnano.9b05168

    Article  Google Scholar 

  • Piaskowski K, Swiderska-Dabrowska R, Kaleniecka A, Zarzycki PK (2017) Advances in the analysis of water and wastewater samples using various sensing protocols and microfluidic devices based on PAD and mu TAS systems. J AOAC Int 100(4):962–970

    Article  Google Scholar 

  • Pu ZH, Tu JA, Han RX, Zhang XG, Wu JW, Fang C et al (2018) A flexible enzyme-electrode sensor with cylindrical working electrode modified with a 3D nanostructure for implantable continuous glucose monitoring. Lab Chip 18(23):3570–3577

    Article  Google Scholar 

  • Shen CY, Lian XK, Kavungal V, Zhong C, Liu DJ, Semenova Y et al (2018) Optical spectral sweep comb liquid flow rate sensor. Opt Lett 43(4):751–754

    Article  Google Scholar 

  • Shikida M, Kim P, Shibata S (2016) Vacuum cavity encapsulation for response time shortening in flexible thermal flow sensor. Microsyst Technol 23(8):3547–3558. https://doi.org/10.1007/s00542-016-3168-9

    Article  Google Scholar 

  • Shikida M, Niimi Y, Shibata S (2017) Fabrication and flow-sensor application of flexible thermal MEMS device based on Cu on polyimide substrate. Microsys Technol Micro Nanosyst Inf Storage Process Syst 23(3):677–685

    Google Scholar 

  • Silvestri S, Schena E (2012) Micromachined flow sensors in biomedical applications. Micromachines 3(2):225–243

    Article  Google Scholar 

  • Steiner H, Cerimovic S, Glatzl T, Kohl F, Schlauf M, Schalkhammer T et al (2016) Flexible flow sensors for air conditioning systems based on printed thermopiles. Procedia Eng 168:830–833. https://doi.org/10.1016/j.proeng.2016.11.284

    Article  Google Scholar 

  • Thurgood P, Zhu JY, Nguyen N, Nahavandi S, Jex AR, Pirogova E et al (2018) A self-sufficient pressure pump using latex balloons for microfluidic applications. Lab Chip 18(18):2730–2740. https://doi.org/10.1039/c8lc00471d

    Article  Google Scholar 

  • Tian B, Li HF, Yang H, Song DL, Bai XW, Zhao YL (2018) A MEMS SOI-based piezoresistive fluid flow sensor. Rev Sci Instrum 89(2):025001

    Article  Google Scholar 

  • Wade JH, Jones JD, Lenov IL, Riordan CM, Sligar SG, Bailey RC (2017) Microfluidic platform for efficient Nanodisc assembly, membrane protein incorporation, and purification. Lab Chip 17(17):2951–2959

    Article  Google Scholar 

  • Won SM, Wang H, Kim BH, Lee K, Jang H, Kwon K et al (2019) Multimodal sensing with a three-dimensional piezoresistive structure. ACS Nano. https://doi.org/10.1021/acsnano.9b02030

    Article  Google Scholar 

  • Wu JW, Wang RD, Yu HX, Li GJ, Xu KX, Tien NC et al (2015) Inkjet-printed microelectrodes on PDMS as biosensors for functionalized microfluidic systems. Lab Chip 15(3):690–695

    Article  Google Scholar 

  • Yu H, Li D, Roberts RC, Xu K, Tien NC (2012) A time-of-flight flow sensor for the volume measurement of trace amount of interstitial fluid. J Micromech Microeng 22(5):055009

    Article  Google Scholar 

  • Zhang F, Gao D, Liang QL (2016) Advances of microfluidic technologies applied in bio-analytical chemistry. Chin J Anal Chem 44(12):1942–1949

    Article  Google Scholar 

Download references

Acknowledgements

This work was supported by the National Key Research and Development Program of China (No. 2017YFA0205103), the National Natural Science Foundation of China (No. 81571766) and the 111 Project of China (No. B07014).

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Correspondence to Dachao Li.

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Pu, Z., Ma, J., Li, W. et al. A flexible precise volume sensor based on metal-on-polyimide electrodes sandwiched by PDMS channel for microfluidic systems. Microfluid Nanofluid 23, 132 (2019). https://doi.org/10.1007/s10404-019-2300-4

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