The article “Application of the Tikhonov Regularization Method in Problems of Ellipsometic Porometry of Low-K Dielectrics”, written by R.A. Gaidukasov, A.V. Myakon’kikh, and K.V. Rudenko, was originally published electronically in Springer-Link on 12 July 2022 without Open Access. After publication in volume 51, no. 4, pp. 199–209, the authors decided to make the article an Open Access publication. Therefore, the copyright of the article has been changed to © The Author(s) 2022 and the article is forthwith distributed under the terms of a Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/, CC BY), which permits use, duplication, adaptation, distribution and reproduction of a work in any medium or format, as long as you cite the original author(s) and publication source, provide a link to the Creative Commons license, and indicate if changes were made.
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Open Access. This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.
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Gaidukasov, R.A., Myakon’kikh, A.V. & Rudenko, K.V. Erratum to: Application of the Tikhonov Regularization Method in Problems of Ellipsometic Porometry of Low-K Dielectrics. Russ Microelectron 51, 358 (2022). https://doi.org/10.1134/S1063739722550017
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DOI: https://doi.org/10.1134/S1063739722550017