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Magnetic Permeability of Co–Ni–Fe Alloy Films Obtained by Electrochemical Deposition

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Abstract

The magnetic properties of films of the Co–Ni–Fe alloy, fabricated by the technology of local electrochemical deposition from a chloride electrolyte, are studied. The dependences of magnetization on the deposition mode, electrolyte composition, and deposition time are determined. It is established that the use of Co–Ni–Fe alloy films with an iron content of 14 to 16% makes it possible to optimize the magnetization characteristics to amplify weak magnetic signals. In magnetic-semiconductor microsystems, Co–Ni–Fe alloy films are used for magnetic field concentrators, which increase the sensitivity of the system.

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Authors and Affiliations

  1. NPK “Technological Center”, 124498, Zelenograd, Moscow, Russia

    R. D. Tikhonov & A. A. Cheremisinov

  2. Moscow Institute of Physics and Technology, 141701, Dolgoprudny, Moscow oblast, Russia

    M. R. Tikhonov

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  1. R. D. Tikhonov
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  2. A. A. Cheremisinov
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  3. M. R. Tikhonov
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Tikhonov, R.D., Cheremisinov, A.A. & Tikhonov, M.R. Magnetic Permeability of Co–Ni–Fe Alloy Films Obtained by Electrochemical Deposition. Russ Microelectron 51, 273–281 (2022). https://doi.org/10.1134/S1063739722050109

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  • DOI: https://doi.org/10.1134/S1063739722050109

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