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Electromechanical modelling and stress analysis of RF MEMS capacitive shunt switch

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Abstract

This paper presents the simulation results as well as calculated results of a proposed RF MEMS shunt switch with Electro-mechanical modelling and stress gradient characteristics. The analysis is done with three membrane structures such as plane beam, incorporated with and without perforations, and non-uniform meander type beam, these are simulated in the COMSOL Multi-physics tool. The various model analysis are carried out for different values of residual stress gradients such as different structures, materials, and beam thickness. The analysis are characterized that the higher values of stress gradient are not desirable for switching action. By analyzing all the results we have observed that the stress analysis for the non-uniform meandered type switch obtained maximum stress of 35.6 MPa, and center deflection of 0.06 MPa/μm, the deformations of the beam which is the least among the considered switches.

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Acknowledgements

The Authors are thankful to National MEMS Design Centre, NIT Silchar, Assam for providing essential Finite Element Modelling tools.

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Authors and Affiliations

  1. Department of ECE, Mizoram University (A Central University), Aizwal, 796001, Mizoram, India

    Ch. Gopi Chand, Reshmi Maity & N. P. Maity

  2. MEMS Research Center, Department of ECE, Koneru Lakshmaiah Education Foundation (Deemed to be University), Green Fields, Vaddeswaram, 522502, Guntur, India

    K. Srinivasa Rao & K. Girija Sravani

  3. Department of ECE, National Institute of Technology, Silchar, 788010, Assam, India

    K. Girija Sravani

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  1. Ch. Gopi Chand
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  2. Reshmi Maity
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  3. K. Srinivasa Rao
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  4. N. P. Maity
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  5. K. Girija Sravani
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Correspondence to Ch. Gopi Chand.

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Chand, C.G., Maity, R., Srinivasa Rao, K. et al. Electromechanical modelling and stress analysis of RF MEMS capacitive shunt switch. Microsyst Technol 28, 2159–2167 (2022). https://doi.org/10.1007/s00542-022-05367-9

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  • DOI: https://doi.org/10.1007/s00542-022-05367-9

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