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Finite Element Modeling of Surface Acoustic Wave Devices Using COMSOL

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Abstract

The results of the research and analysis of wave acoustic processes in piezoelectric substrates based on the solution of wave equations of piezoacoustics by the finite element method are presented. A description of the test structures and the algorithm of the work in the COMSOL Multiphysics environment are given. Three main approaches are considered: in the region of eigenfrequencies, in the given frequency range, and in the time domain. The properties and parameters of widely used surface acoustic waves are analyzed. The visualization of a number of characteristics is presented. The phase velocity of the wave and the electromechanical coupling coefficient are calculated. It is shown that the data obtained as a result of numerical analysis correspond to the data from known sources. The results of the calculation and experimental measurements of the transmission coefficient are compared using the example of a delay line and a resonator filter.

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  1. St. Petersburg State Electrotechnical University “LETI”, 197376, St. Petersburg, Russia

    A. S. Koigerov & A. V. Korlyakov

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  1. A. S. Koigerov
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  2. A. V. Korlyakov
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Correspondence to A. S. Koigerov.

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Koigerov, A.S., Korlyakov, A.V. Finite Element Modeling of Surface Acoustic Wave Devices Using COMSOL. Russ Microelectron 51, 226–235 (2022). https://doi.org/10.1134/S1063739722040072

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