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Effect of Ion-Beam Treatment on the Structure and Properties of Titanium-Oxide Films

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Abstract

The effect of the condensation temperature and ion-beam treatment alternating with high-frequency magnetron sputtering on the structure and optical properties of thin titanium-oxide films is studied. The films have homogeneous compositions and granular structures; ion-beam treatment changes the grain shape from elongated to rounded. The X-ray diffraction studies show that the phase composition of the films is represented by two modifications of titanium oxide: rutile and anatase. It is found that the increase in the condensation temperature and the intensity of ion-beam treatment influences the film phase composition and their refractive indices. At a low condensation temperature, the dominant phase is rutile; as the condensation temperature increases, the anatase phase forms. An increase in the current density of ion-beam treatment leads to a decrease in the anatase fraction. The decrease in the refractive index of the titanium-oxide films with an increase in the condensation temperature is related to the formation of the anatase phase. Ion-beam treatment also decreases the band-gap width from 3.40 to 3.30 eV.

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CONFLICT OF INTEREST

The authors declare that they have no conflicts of interest.

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Authors and Affiliations

  1. Udmurt State University, 426034, Izhevsk, Russia

    A. K. Gabova, P. N. Krylov, R. M. Zakirova & I. V. Fedotova

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  1. A. K. Gabova
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  2. P. N. Krylov
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  3. R. M. Zakirova
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  4. I. V. Fedotova
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Correspondence to P. N. Krylov.

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Translated by Yu. Ryzhkov

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Gabova, A.K., Krylov, P.N., Zakirova, R.M. et al. Effect of Ion-Beam Treatment on the Structure and Properties of Titanium-Oxide Films. J. Surf. Investig. 16, 226–232 (2022). https://doi.org/10.1134/S1027451022030090

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