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Electrophysical Parameters and Emission Spectra of a DC Glow Discharge in the Freon R-23 Medium

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Abstract

The electrophysical parameters of the R-23 freon plasma are measured depending on the external parameters of the discharge in a wide range of conditions. It is found that the gas temperature increases linearly as the gas pressure and discharge current increase. The behavior of parameter E/N is typical for electronegative gases. The emission spectra of a glow discharge in R-23 freon are obtained and analyzed. It is found that the plasma radiation is represented by atomic and molecular components, and the dependences of the intensities of the emission of lines and bands on the external conditions of the discharge are determined by the excitation of the emitting states by the direct electron impact.

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Funding

This study was carried out as part of a state assignment (topic no. FZZW-2020-0007) for the implementation of scientific research.

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Authors and Affiliations

  1. Ivanovo State University of Chemistry and Technology, 153000, Ivanovo, Russia

    D. B. Murin, S. A. Pivovarenok, A. A. Malyugin & A. V. Bobylev

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  1. D. B. Murin
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  2. S. A. Pivovarenok
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  3. A. A. Malyugin
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  4. A. V. Bobylev
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Correspondence to D. B. Murin.

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Murin, D.B., Pivovarenok, S.A., Malyugin, A.A. et al. Electrophysical Parameters and Emission Spectra of a DC Glow Discharge in the Freon R-23 Medium. Russ Microelectron 51, 164–169 (2022). https://doi.org/10.1134/S106373972202007X

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  • DOI: https://doi.org/10.1134/S106373972202007X

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