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Laser Induced Dielectric Breakdown as a Novel Method for the Synthesis of Molybdenum Boride

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Abstract

Laser induced dielectric breakdown (LIDB) on a surface of solid Mo in H2/BF3 atmosphere at 30–760 Torr and in a gaseous mixture MoF6/H2/BF3 + at 760 Torr pressure is tested for synthesis and deposition of superhard molybdenum borides that are needed in many areas of industry and technology. The emission spectra of the plasma and the dynamics of the gas discharge near the substrate are investigated. A comparative analysis of the gas mixture before and after exposure to LIDB plasma is carried out using IR spectroscopy. The conditions for the formation of molybdenum borides are determined. A thermodynamic analysis of the MoF6/H2/BF3 and Mo/H2/BF3 systems is carried out to determine the temperature range for the formation of molybdenum borides and establish the main chemical reactions responsible for their formation. Deposits containing MoB and MoB2 phases are obtained. For the mixture MoF6/H2/BF3, the deposit exhibits an amorphous layered structure, which contains 19.15 wt% F, 30.45% O, and 0.8% Si. For the Mo/H2/BF3 system at the pressures 30 and 160 Torr, nanopowder of molybdenum boride is produced with a characteristic grain size of 100 nm. At pressures above 160 Torr, Mo nanopowder with a grain size < 30 nm is obtained.

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Acknowledgements

The authors are very grateful to the RSF Grant No 20-13-00035 basic support. as well as the Russian Ministry of Education and Science (subject 0095-2019-0008) for the partial support.

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Authors and Affiliations

  1. G.G. Devyatykh Institute of Chemistry of High-Purity Substances of RAS, 49 Tropinina Str., Nizhny Novgorod, Russia, 603951

    R. A.Kornev, P. G. Sennikov, A. A.Ermakov, V. E. Shkrunin & V. S. Polykov

  2. BAM Federal Institute for Materials Research and Testing, 11 Richard‑Willstätter‑Strasse, 12489, Berlin, Germany

    I. B. Gornushkin

  3. Mechanical Engineering Research Institute of RAS, 85 Belinsky Str., Nizhny Novgorod, Russia, 603024

    A. R. Kornev

  4. Lobachevsky Nizhny Novgorod State University, 23 Gagarin Av., Nizhny Novgorod, Russia, 603950

    K. D. Kornev

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  1. R. A.Kornev
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  2. P. G. Sennikov
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  3. I. B. Gornushkin
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  4. A. A.Ermakov
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  5. V. E. Shkrunin
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  6. V. S. Polykov
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  7. A. R. Kornev
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  8. K. D. Kornev
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Correspondence to R. A.Kornev.

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A.Kornev, R., Sennikov, P.G., Gornushkin, I.B. et al. Laser Induced Dielectric Breakdown as a Novel Method for the Synthesis of Molybdenum Boride. Plasma Chem Plasma Process 42, 395–412 (2022). https://doi.org/10.1007/s11090-021-10224-0

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