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The Formation of Spherical and Tree Particles during Diamond Growth by Chemical Vapor Deposition

  • NANOSCALE AND NANOSTRUCTURED MATERIALS AND COATINGS
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Abstract

A model is proposed for the formation of spherical and treelike particles during the growth of diamond films by chemical vapor deposition (CVD) using a direct current electric discharge to activate. Spherical diamond particles are formed when the surface energies of different diamond faces are equal, which arises during growth with a certain temperature, depending on the parameters of the gaseous medium. The growth of tree particles is created by the movement of charged particles along the lines of the electric field.

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REFERENCES

  1. Khmel'nitskii, R.A., Talipov, N.Kh., and Chucheva, G.V., Sinteticheskii almaz dlya elektroniki i optiki (Synthetic Diamond for Electronic Engineering and Optics), Moscow: Ikar, 2017.

  2. CVD Diamond for Electronic Devices and Sensors, Sussmann, R.S., Ed., Wiley, 2009.

    Google Scholar 

  3. Fujimori, N., Proc. Int. Conference on New Diamond and Nano Carbons NDNC. 2007, Osaka, 2007, p. 7.

  4. Sosenkin, V.E., Aleksenko, A.E., Rychagov, A.Yu., Mayorova, N.A., Ovchinnikov-Lazarev, M.A., Spitsyn, B.V., and Vol’fkovich, Yu.M., Prot. Met. Phys. Chem. Surf., 2019, vol. 55, no. 4, p. 646.

    Article  CAS  Google Scholar 

  5. Liu, H. and Dandy, D.S., Diamond Chemical Vapor Deposition. Nucleation and Early Growth Stage, Park Ridge, NJ: Noyes Publ., 1995, p. 155.

    Google Scholar 

  6. Langmuir, J. and Dushman, S., Phys. Rev., 1922, vol. 20, p. 113.

    Google Scholar 

  7. Blaut-Blachev, A.N., Averin, A.A., Shapagin, A.V., and Spitsyn, B.V., Prot. Met. Phys. Chem. Surf., 2017, vol. 53, no. 1, p. 75.

    Article  CAS  Google Scholar 

  8. Nemanich, R.J., et al., Proc. 2nd Int. Conference on New Diamond Science and Technology, Washington, DC, September 23–27, 1990.

  9. Zhang, Y., Zhang, F., and Chen, G., Mater. Lett., 1994, vol. 20, p. 39.

    Article  CAS  Google Scholar 

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ACKNOWLEDGMENTS

The experimental study of the obtained samples was carried out on the equipment of the Center for Collective Use of the Frumkin Institute of Physical Chemistry and Electrochemistry, Russian Academy of Sciences.

Funding

This work was financially supported by the Ministry of Education and Science of the Russian Federation, project no. АААА-А19-119011790097-9.

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Authors and Affiliations

  1. Frumkin Institute of Physical Chemistry and Electrochemistry, Russian Academy of Sciences, 119071, Moscow, Russia

    A. N. Blaut-Blachev, A. A. Averin, A. V. Shapagin & B. V. Spitsyn

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  1. A. N. Blaut-Blachev
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  2. A. A. Averin
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  3. A. V. Shapagin
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  4. B. V. Spitsyn
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Corresponding authors

Correspondence to A. V. Shapagin or B. V. Spitsyn.

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Blaut-Blachev, A.N., Averin, A.A., Shapagin, A.V. et al. The Formation of Spherical and Tree Particles during Diamond Growth by Chemical Vapor Deposition. Prot Met Phys Chem Surf 57, 760–763 (2021). https://doi.org/10.1134/S2070205121040079

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  • DOI: https://doi.org/10.1134/S2070205121040079

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