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A Small Size On-chip Temperature Sensor Based on a Microring Resonator

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Abstract

In this paper, a small size on-chip temperature sensor based on microring resonator (MRR) is introduced. The sensor consists of a small microring waveguide with a radius of 3.1   μm and a runway waveguide with the same bending radius. To a certain extent, it solves the problem that high sensitivity and small size cannot coexist in the current on-chip temperature sensor, and provides a reference scheme for the design of on-chip temperature sensor. The experimental results show that the sensitivity of the sensor is 100pm/℃, which breaks through the limit of 83pm/℃ for single microring. The free spectral range (FSR) is 39.25nm, and the resolution ratio is 0.47℃, the temperature measurement range is improved, and a better resolution ratio is obtained. The microring temperature sensor designed in this paper has high sensitivity and small size structure (only 360µm2), which is suitable for temperature measurement of Very Large Scale Integration (VLSI). It has great research value and application potential in the field of System-on-Chip (SoC) temperature detection.

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Acknowledgements

We are thankful to the reviewers for the valuable suggestion.

Funding

This work is supported by National Natural Science Foundation of China (61861012), Guangxi Key Laboratory of Automatic Detecting Technology and Instruments (YQ21105), Science Foundation of Guilin University of Aerospace Technology (XJ20KT09) and Research Basic Ability Improvement Project for Young and Middle-aged Teachers of Guangxi Universities (2021KY0800).

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Authors and Affiliations

  1. School of Electronic Engineering and Automation, Guilin University of Electronic Technology, Guilin, Guangxi, 541004, China

    Cong Hu, Yunying Shi, Chuanpei Xu & Aijun Zhu

  2. School of Electronic Information and Automation, Guilin University of Aerospace Technology, Guilin, Guangxi, 541004, China

    Tian Zhou

  3. Guangxi Key Laboratory of Automatic Detecting Technology and Instruments, Guilin, Guangxi, 541004, China

    Cong Hu, Yunying Shi, Chuanpei Xu & Aijun Zhu

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  1. Cong Hu
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  2. Yunying Shi
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  3. Tian Zhou
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  4. Chuanpei Xu
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  5. Aijun Zhu
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All the authors are equally contributed in the manuscript.

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Correspondence to Tian Zhou.

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Hu, C., Shi, Y., Zhou, T. et al. A Small Size On-chip Temperature Sensor Based on a Microring Resonator. Silicon 14, 5847–5854 (2022). https://doi.org/10.1007/s12633-021-01247-5

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  • DOI: https://doi.org/10.1007/s12633-021-01247-5

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