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Inorganic salt assisted high temperature hydrothermal synthesis of ordered mesoporous silicas with enhanced stability and ultralow dielectric constants

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Abstract

The thermal insulators with extraordinarily ultra-low dielectric constants (k < 2.0) show great application potentials of superior insulators in microelectronics and semiconductor industry. We report here a class of ordered mesoporous silicas (OMSs) with ultra-low dielectric constants synthesized from a high-temperature hydrothermal strategy (~ 200 °C), in which amphiphilic triblock copolymer (P123: PEO20-PPO70-PEO20, F127: PEO106-PPO70-PEO106) was used as a soft template and inorganic salts (e.g. K2SO4) was employed as framework condensation promoter. Characterizations of small angle XRD patterns and N2 isotherms show that the resultant OMSs possess ordered mesostructure, large BET surface area (197–829 m2/g), tunable micro-mesopore volumes (Vmicro: 0–0.08 cm3/g, Vmeso: 0.22–1.19 cm3/g). 29Si MAS NMR spectra show that these OMSs samples have much enhanced crosslinking degree of silicon framework in comparison with the samples synthesized at low temperatures. Interestingly, the OMSs exhibit extraordinarily ultra-low k values up to 1.28, which is interpreted by a collaborative effect of tunable large pore volume and highly crosslinked silicon framework with rather limited surface hydroxyl group.

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Acknowledgements

We acknowledge the financial support from the Research Project of Keyi College of Zhejiang Sci-Tech University (KY2021001), the National Natural Science Foundation of Zhejiang Province China (LY15B030002).

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Authors and Affiliations

  1. School of Chemistry and Environmental Engineering, Yancheng Teachers University, Yancheng, 224007, Jiangsu, China

    Xiankun Wu & Yiwen Gu

  2. Department of Computer Science and Engineering, Shaoxing University, Shaoxing, 312000, China

    Jing Liu

  3. Jiangsu Nanda Huaxing Science and Technology of Environmental Protection Co. Ltd., Yancheng, 224001, China

    Xiankun Wu & Yang Chen

  4. Keyi College of Zhejiang Sci-Tech University, 58 Kangyang Avenue, Shangyu Economic and Technological Development Zones, Shaoxing, 312369, China

    Xinggang Shan

  5. Boya International Academy Shaoxing, Shaoxing, 312000, China

    Boyuan Tang

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  1. Xiankun Wu
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Wu, X., Liu, J., Gu, Y. et al. Inorganic salt assisted high temperature hydrothermal synthesis of ordered mesoporous silicas with enhanced stability and ultralow dielectric constants. J Porous Mater 29, 9–17 (2022). https://doi.org/10.1007/s10934-021-01145-6

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