Abstract
In the semiconductor manufacturing industry, the dynamic model of a controlled object is usually obtained from a frequency sweeping method before motion control. However, the existing isolators cannot properly isolate the disturbance of the inertial force on the platform base during frequency sweeping (the frequency is between 0 Hz and the natural frequency). In this paper, an adjustable anti-resonance frequency controller for a dual-stage actuation semi-active vibration isolation system (DSA-SAVIS) is proposed. This system has a significant anti-resonance characteristic; that is, the vibration amplitude can drop to nearly zero at a particular frequency, which is called the anti-resonance frequency. The proposed controller is designed to add an adjustable anti-resonance frequency to fully use this unique anti-resonance characteristic. Experimental results show that the closed-loop transmissibility is less than −15 dB from 0 Hz to the initial anti-resonance frequency. Furthermore, it is less than −30 dB around an added anti-resonance frequency which can be adjusted from 0 Hz to the initial anti-resonance frequency by changing the parameters of the proposed controller. With the proposed controller, the disturbance amplitude of the payload decays from 4 to 0.5 mm/s with a reduction of 87.5% for the impulse disturbance applied to the platform base. Simultaneously, the system can adjust the anti-resonance frequency point in real time by tracking the frequency sweeping disturbances, and a good vibration isolation performance is achieved. This indicates that the DSA-SAVIS and the proposed controller can be applied in the guarantee of an ultra-low vibration environment, especially at frequency sweeping in the semiconductor manufacturing industry.
摘要
在半导体制造业中, 被控对象的动态模型通常是在运动控制前通过扫频方法获得。然而, 现有隔离器不能很好隔离扫频时惯性力(频率在0 Hz和固有频率之间)对平台基座的干扰。本文提出一种用于双级驱动半主动隔振系统的可调反共振频率控制器。双级驱动半主动隔振系统具有显著的反共振特性, 在一个特定频率——即所谓反共振频率——振幅可降至接近零。本控制器的设计目的是增加一个可调的控制器反共振频率, 以充分利用这种独特的反共振特性。实验结果表明了本方案的可行性, 闭环传递率从0 Hz到初始反共振频率小于−15 dB。此外, 在附加反共振频率附近, 闭环传递率小于−30 dB, 可通过改变控制器参数实现附加反共振频率在0 Hz至初始反共振频率之间的调节。当平台基座受到脉冲扰动时, 使用本文提出的控制器, 有效载荷扰动幅度从4 mm/s衰减至0.5 mm/s, 降低87.5%。同时, 通过跟踪扫频干扰, 系统可实时调整反共振频率点, 获得良好隔振性能。这表明双级驱动半主动隔振系统和所提控制器可应用于保证超低振动环境, 特别是在半导体制造业的扫频工作中。
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Project supported by the National Natural Science Foundation of China (No. 51975160)
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Bo ZHAO and Jiubin TAN designed the research. Weijia SHI and Bingquan WANG processed the data. Bo ZHAO drafted the manuscript. Weijia SHI and Bingquan WANG helped organize the manuscript. Jiubin TAN revised and finalized the paper.
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Bo ZHAO, Weijia SHI, Bingquan WANG, and Jiubin TAN declare that they have no conflict of interest.
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Zhao, B., Shi, W., Wang, B. et al. An adjustable anti-resonance frequency controller for a dual-stage actuation semi-active vibration isolation system. Front Inform Technol Electron Eng 22, 1390–1401 (2021). https://doi.org/10.1631/FITEE.2000373
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DOI: https://doi.org/10.1631/FITEE.2000373
Key words
- Semi-active vibration isolation
- Dual-stage actuation
- Dynamic vibration absorption
- Adjustable anti-resonance frequency controller