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The Possibilities of Increasing the Accuracy of Measuring Absolute Distances by the Method of Spectral Low Coherence Interferometry

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Abstract

The possibilities of improving the measurement accuracy of fiber-optic sensors of absolute distances of the nanometer range using the spectral method of fiber-optic low-coherence interferometry have been investigated. The possibility of measuring the distance with an error of no more than \( \pm 15~\) nm in the range of 20–250 μm has been shown.

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ACKNOWLEDGMENTS

The authors are grateful to OOO T-8 for providing the Ando AQ6377 spectrum analyzer for the experiments.

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The work was carried out according to the plan of the State Assignment.

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Correspondence to V. T. Potapov.

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Potapov, V.T., Zhamaletdinov, N.M. The Possibilities of Increasing the Accuracy of Measuring Absolute Distances by the Method of Spectral Low Coherence Interferometry. Instrum Exp Tech 64, 542–545 (2021). https://doi.org/10.1134/S0020441221040084

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  • DOI: https://doi.org/10.1134/S0020441221040084

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