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Effect of the Thermal Sputtering Parameters on the Cohesive Strength of Functional Resistant Coatings

  • RELIABILITY, STRENGTH, AND WEAR RESISTANCE OF MACHINES AND STRUCTURES
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Abstract

The effect of the main thermal sputtering parameters on the cohesive strength of the coating with respect to the substrate surface is considered. At the stages of particle heating, acceleration, transfer, and contact, the relationships between the parameters of the sputtering process and the factors that determine the cohesive strength between the sputtered material and the substrate surface have been revealed. The relationships between the cohesive strength and the technological parameters and sputtering modes in the operations of applying and machining of functional resistant coatings are formalized.

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Authors and Affiliations

  1. Bauman Moscow State Technical University, 105005, Moscow, Russia

    A. A. Kovalev & A. S. Krasko

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  1. A. A. Kovalev
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  2. A. S. Krasko
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Correspondence to A. A. Kovalev or A. S. Krasko.

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Translated by O. Polyakov

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Kovalev, A.A., Krasko, A.S. Effect of the Thermal Sputtering Parameters on the Cohesive Strength of Functional Resistant Coatings. J. Mach. Manuf. Reliab. 50, 208–215 (2021). https://doi.org/10.3103/S1052618821030080

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  • DOI: https://doi.org/10.3103/S1052618821030080

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