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Plasma-Chemical Synthesis of Ytterbium Doped As–S Thin Films

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Abstract

In this work, for the first time, the Plasma-enhanced chemical vapor deposition (PECVD) method was used for the direct one-stage synthesis of the IR-transparent amorphous chalcogenide films of the binary As–S system doped with ions of the rare-earth element—ytterbium. RF (40 MHz) inductively coupled low-temperature non-equilibrium plasma discharge was utilized for the initiation of chemical interactions between precursors. High-pure arsenic monosulfide, sulfur, and elemental ytterbium were the initial substances. The reactive species formed in the gas phase were studied in-situ by the Optical emission spectroscopy technique. It was proved that the PECVD method allows fabrication of the film in the wide range of Yb concentrations: the ytterbium content in the films was varied in the range of 1–7 at%. Dependence of structural, optical properties, and intensity of the photoluminescence on the composition of the films was also studied.

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Acknowledgements

The reported study was funded by RFBR, Sirius University of Science and Technology, JSC Russian Railways and Educational Fund “Talent and success”, Project Number 20-38-51003.

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Authors and Affiliations

  1. Department of Nanotechnology and Biotechnology, Nizhny Novgorod State Technical University n.a., R.E. Alekseev, 24 Minina Street, Nizhny Novgorod, Russian Federation, 606950

    L. A. Mochalov, M. A. Kudryashov, A. A. Logunov, Yu. P. Kudryashova, V. M. Malyshev, P. N. Drozdov & V. M. Vorotyntsev

  2. Department of Physics and Optical Science, University of North Carolina At Charlotte, 9201 University City Blvd, Charlotte, NC, 28223-0001, USA

    L. A. Mochalov

  3. Sirius University of Science and Technology, 1 Olympic Ave, Sochi, Russian Federation, 354340

    L. A. Mochalov

  4. National Research University Higher School of Economics, Moscow, Russian Federation

    A. V. Kovalev

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  1. L. A. Mochalov
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  2. M. A. Kudryashov
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  3. A. A. Logunov
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  4. Yu. P. Kudryashova
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  5. V. M. Malyshev
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  6. P. N. Drozdov
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  7. A. V. Kovalev
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  8. V. M. Vorotyntsev
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Correspondence to L. A. Mochalov.

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Mochalov, L.A., Kudryashov, M.A., Logunov, A.A. et al. Plasma-Chemical Synthesis of Ytterbium Doped As–S Thin Films. Plasma Chem Plasma Process 41, 1661–1670 (2021). https://doi.org/10.1007/s11090-021-10190-7

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