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Synthesis, Properties and Structure of Arc-PVD Molybdenum and Molybdenum Nitride Monolayer Coatings

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Russian Physics Journal Aims and scope

The paper deals with the synthesis of coating based on molybdenum and molybdenum nitrides using cathodic arc deposition without the plasma assistance. The properties, composition and structure of the obtained coating are studied in detail. It is found that the nitrogen partial pressure in the gas mixture affects the nitrogen concentration in the coatings and the properties of the latter. The structure and phase composition of the coatings synthesized at a low partial pressure, are investigated by using the X-ray diffraction analysis and scanning electron microscopy.

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References

  1. A. A. Andreev, L. P. Sablev, and S. N. Grigor'ev, Arc-PVD Coatings [in Russian], Kharkiv (2010).

  2. M. K. Kazmanli, M. Urgen, and A. F. Cakir, Surf. Coat. Technol., 167, 77–82 (2003).

    Article  Google Scholar 

  3. Xiaodong Zhu, Di Yue, Chen Shang, et al., Surf. Coat. Technol., 228, S184–S189 (2013).

  4. A. Gilewicz, B. Warcholinski, and D. Murzynski, Surf. Coat. Technol., 236, 149–158 (2013).

    Article  Google Scholar 

  5. Jian-Ying Xiang and Fan-Bean Wu, Surf. Coat. Technol., 332, 161–167 (2017).

  6. Tao Wang, Guojun Zhang, Shuai Ren, and Bailing Jiang, J. Alloys Compd., 701, 1–8 (2017).

  7. C. Sarioglu, Ugur Demirler, M. Kursat Kazmanli, and M. Urgen, Surf. Coat. Technol., 190, 238–243 (2005).

  8. O. V. Krysina, N. N. Koval’, I. V. Lopatin, and V. V. Shugurov, Izv. Vyssh. Uchebn. Zaved., Fiz., 57, No. 11/3, 88–92 (2014).

  9. O. V. Krysina, N. N. Koval, I. V. Lopatin, et al., J. Phys.: Conf. Ser., 669, 012032 (2016).

    Google Scholar 

  10. O. V. Krysina, V. V. Shugurov, N. A. Prokopenko, and E. A. Petrikova, J. Phys.: Conf. Ser., 1115, 032075 (2018).

    Google Scholar 

  11. L. G. Vintizenko, S. V. Grigor'ev, N. N. Koval', et al., Russ. Phys. J., 44, No. 9, 927–936 (2001).

  12. O. Krysina, V. Shugurov, N. Koval, and N. Prokopenko, Key Eng. Mater., 712, 9–14 (2016).

    Article  Google Scholar 

  13. V. V. Shugurov, N. N. Koval, O. V. Krysina, and N. A. Prokopenko, J. Phys.: Conf. Ser., 1393, 012131 (2019).

    Google Scholar 

  14. A. A. Kalushevich, N. N. Koval, V. V. Denisov, V. V. Yakovlev, and V. V. Shugurov, Izv. Vyssh. Uchebn. Zaved., Fiz., 55, No. 12/3, 118–122 (2012).

  15. Jian Wang, Paul Munroe, Zhifeng Zhou, and Zonghan Xie, Thin Solid Films, 682, 82–92 (2019).

  16. J. Wang, M. A. P. Yazdi, et al., Surf. Coat. Technol., 320, 441–446 (2017).

    Article  Google Scholar 

  17. A. D. Pogrebnjak, V. M. Beresnev, O. V. Bondar, et al., Mater. Design, 153, 47–59 (2018).

    Article  Google Scholar 

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Correspondence to O. V. Krysina.

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Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 2, pp. 107–114, February, 2021.

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Krysina, O.V., Ivanov, Y.F., Prokopenko, N.A. et al. Synthesis, Properties and Structure of Arc-PVD Molybdenum and Molybdenum Nitride Monolayer Coatings. Russ Phys J 64, 309–316 (2021). https://doi.org/10.1007/s11182-021-02330-5

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  • DOI: https://doi.org/10.1007/s11182-021-02330-5

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