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Impact of the meso-PSi substrate on ZnO thin films deposited by spray pyrolysis technique for UV photodetectors

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Abstract

ZnO thin films were successfully deposited via spray pyrolysis technique over various substrates, including glass, silicon, and mesoporous silicon (PSi). The effect of substrate type on the surface morphological, structural, and electrical properties of ZnO thin film was investigated. Scanning Electron Microscopy confirms the morphology of the meso-PSi substrate and displays the morphologies of the deposited ZnO. The (ZnO/PSi) heterojunction shows a porous ZnO layer with a large surface area by comparison to other structures. The patterns of X-ray Diffraction exposed that the deposited ZnO films have a hexagonal wurtzite polycrystalline structure. Ultraviolet (UV) metal-semiconductor-metal photodetectors have been investigated. The fabricated (ZnO/PSi) UV photodetector showed much higher photocurrent than other structures.

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Acknowledgements

The authors thank the Thematic Research in Science and Technology Agency (ATRST) to finance the project and the CCLO technical platform of Institut FOTON for helping in the realization and characterization of the structures.

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Author notes

  1. Abdellah Rahmani

    Present address: Laboratoire des Matériaux et Structure des Systèmes Électromécaniques et leur Fiabilité LMSSEF, Larbi Ben M’hidi University, 04000, Oum El Bouaghi, Algérie

Authors and Affiliations

  1. Laboratoire des Matériaux et Structure des Systèmes Électromécaniques et leur Fiabilité LMSSEF, Larbi Ben M’hidi University, 04000, Oum El Bouaghi, Algérie

    Louardi Remache

  2. Université de Rennes1, CNRS, Institut FOTON, UMR-CNRS 6082, BP80518, F-22305, Lannion Cedex, France

    Abdellah Rahmani & Mohammed Guendouz

  3. Department of Physics Faculty of Sciences, King Abdulaziz University, Jeddah, Saudi Arabia

    M. s. Aida

  4. Laboratoire Physico-Chimie des Matériaux (LPCM), Université Amar Telidji de Laghouat, BP 37G, 03000, Laghouat, Algeria

    Zoulikha Hebboul

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Rahmani, A., Remache, L., Guendouz, M. et al. Impact of the meso-PSi substrate on ZnO thin films deposited by spray pyrolysis technique for UV photodetectors. Appl. Phys. A 127, 396 (2021). https://doi.org/10.1007/s00339-021-04548-z

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