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Rigidity of a Multilayer Piezoelectric Actuator for the Nano and Micro Range

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Abstract

The rigidity and elastic pliability of a multilayer piezoelectric actuator for the nano and micro range is investigated. Its mechanical and control characteristics are determined. The rigidity and elastic pliability are considered for different types of control.

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Authors and Affiliations

  1. National Research University of Electronic Technology (MIET), 124498, Moscow, Zelenograd, Russia

    S. M. Afonin

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  1. S. M. Afonin
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Correspondence to S. M. Afonin.

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Translated by B. Gilbert

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Afonin, S.M. Rigidity of a Multilayer Piezoelectric Actuator for the Nano and Micro Range. Russ. Engin. Res. 41, 285–288 (2021). https://doi.org/10.3103/S1068798X21040031

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  • DOI: https://doi.org/10.3103/S1068798X21040031

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