Skip to main content

Advertisement

Log in

Rate coefficients for \(\hbox {Ar}^{{\mathbf {+}}}\) in \(\hbox {Ar/BF}_{{\mathbf {3}}}\) mixtures

  • Regular Article - Plasma Physics
  • Published:
The European Physical Journal D Aims and scope Submit manuscript

Abstract

In this paper, we present most probable reactions of \(\hbox {Ar}^{{+}}\) ion with \(\hbox {Ar/BF}_{{3}}\) mixtures. Appropriate gas phase enthalpies of formation for the products were used to calculate scattering cross section as a function of kinetic energy. These data are needed for modeling in numerous applications of technologically important \(\hbox {BF}_{{3}}\) discharges. Results for transport parameters, specially rate coefficients as a function of E/N (E-electric field; N-gas density) were obtained by using the Monte Carlo technique.

Graphic abstract

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5

Similar content being viewed by others

Data Availability Statement

This manuscript has associated data in a data repository. [Authors’ comment: All relevant data are in the paper.]

References

  1. T. Makabe, Z. Petrović, Plasma Electronics: Applications in Microelectronic Device Fabrication Taylor and Francis (CRC Press, New York, 2006)

    Book  Google Scholar 

  2. R.E. Robson, R.D. White, Z.Lj Petrović, Rev. Mod. Phys. 77, 1303 (2005)

    Article  ADS  Google Scholar 

  3. T. Murakami, K. Niemi, T. Gans, D. O’Connell, W.G. Graham, Plasma Sources Sci. Technol. 22, 015003 (2013)

    Article  ADS  Google Scholar 

  4. https://nl.lxcat.net/data/set_type.php

  5. Ž. Nikitović, Z. Raspopović, V. Stojanović, Acta Phys. Pol. A 132, 1420 (2017)

    Article  ADS  Google Scholar 

  6. Ž. Nikitović, Z. Raspopović, V. Stojanović, Plasma Sources Sci. Technol. 26, 044004 (2017)

    Article  ADS  Google Scholar 

  7. V. Stojanović, Z. Raspopović, J. Jovanović, Ž. Nikitović, Z.Lj Petrović, EPL 101, 45003 (2013)

    Article  ADS  Google Scholar 

  8. M.A. Lieberman, A.J. Lichtenberg, Principles of Plasma Discharges and Materials Processing (Wiley, New York, 1994)

    Google Scholar 

  9. A. Kaboth, J. Monroe, S. Ahlen, D. Dujmić, S. Henderson, G. Kohse, R. Lanza, M. Lewandowska, A. Roccaro, G. Sciolla, N. Skvorodnev, H. Tomita, R. Vanderspek, H. Wellenstein, R. Yamamoto, P. Fisher, Nucl. Instrum. Methods Phys. Res. 592, 63–72 (2008)

    Article  ADS  Google Scholar 

  10. E. Parker, F.S.M. El-Ashhab, Int. J. Mass Spectrom. Ion Phys. 47, 159 (1983)

    Article  ADS  Google Scholar 

  11. A.V. Phelps, J. Appl. Phys. 76, 747 (1994)

    Article  ADS  Google Scholar 

  12. B.-W. Koo, Z. Fang, L. Godet, S.B. Radovanov, C. Cardinaud, G. Cartry, A. Grouillet, D. Lenoble, IEEE Trans. Plasma Sci. 32, 456 (2004)

    Article  ADS  Google Scholar 

  13. Ž. Nikitović, S. Radovanov, L. Godet, Z. Raspopović, O. Šašić, V. Stojanović, Z.Lj Petrović, EPL 95, 45003 (2011)

    Article  ADS  Google Scholar 

  14. https://nl.lxcat.net/cache/5b33772b61cf9/%20

  15. Phelps A. database, private communication (2019) www.lxcat.net. Accessed 4 Feb 2019

  16. Z. Lj Petrović, V.D. Stojanović, J. Vac. Sci. Technol. 16, 329 (1998)

    Article  ADS  Google Scholar 

  17. G.K. Jarvis, R.A. Kennedy, C.A. Mayhew, R.P. Tuckett, Int. J. Mass Spectrom. 202, 323 (2000)

    Article  Google Scholar 

  18. R.E. Robson, Aust. J. Phys. 44, 685 (1991)

    Article  ADS  Google Scholar 

  19. Z. Raspopović, S. Sakadžić, Z. Lj Petrović, T. Makabe, J. Phys. D 33, 1298 (2000)

  20. Ž. Nikitović, V. Stojanović, Z. Raspopović, Acta Phys. Pol. A 134, 1134 (2018)

    Article  ADS  Google Scholar 

  21. Ž. Nikitović, Z. Raspopović, V. Stojanović, Eur. Phys. J. D 72, 168 (2018)

    Article  ADS  Google Scholar 

  22. Z. Ristivojević, Z. Lj Petrović, Plasma Sources Sci. Technol. 21, 035001 (2012)

    Article  ADS  Google Scholar 

  23. Ž Nikitović, M. Gilić, J. Mitrić, Z. Raspopović, SPIG, Belgrade, Serbia 24–28, 79 (2020)

Download references

Acknowledgements

The author acknowledge funding provided by the Institute of Physics University Belgrade, through the grant by the Ministry of Education, Science and Technological Development of the Republic of Serbia.

Author information

Authors and Affiliations

Authors

Contributions

Z̆eljka Nikitović - Thematic direction of research and work coordination. Organization and writing of the paper, calculation of endothermic and exothermic collisions. Zoran Raspopović - Monte Carlo simulations for cases where endothermic and exothermic collisions are included, graphical presentation.

Corresponding author

Correspondence to Ž. D. Nikitović.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Nikitović, Ž.D., Raspopović, Z.M. Rate coefficients for \(\hbox {Ar}^{{\mathbf {+}}}\) in \(\hbox {Ar/BF}_{{\mathbf {3}}}\) mixtures. Eur. Phys. J. D 75, 118 (2021). https://doi.org/10.1140/epjd/s10053-021-00061-3

Download citation

  • Received:

  • Accepted:

  • Published:

  • DOI: https://doi.org/10.1140/epjd/s10053-021-00061-3

Navigation