Abstract
In this paper, we present most probable reactions of \(\hbox {Ar}^{{+}}\) ion with \(\hbox {Ar/BF}_{{3}}\) mixtures. Appropriate gas phase enthalpies of formation for the products were used to calculate scattering cross section as a function of kinetic energy. These data are needed for modeling in numerous applications of technologically important \(\hbox {BF}_{{3}}\) discharges. Results for transport parameters, specially rate coefficients as a function of E/N (E-electric field; N-gas density) were obtained by using the Monte Carlo technique.
Graphic abstract
Similar content being viewed by others
Data Availability Statement
This manuscript has associated data in a data repository. [Authors’ comment: All relevant data are in the paper.]
References
T. Makabe, Z. Petrović, Plasma Electronics: Applications in Microelectronic Device Fabrication Taylor and Francis (CRC Press, New York, 2006)
R.E. Robson, R.D. White, Z.Lj Petrović, Rev. Mod. Phys. 77, 1303 (2005)
T. Murakami, K. Niemi, T. Gans, D. O’Connell, W.G. Graham, Plasma Sources Sci. Technol. 22, 015003 (2013)
Ž. Nikitović, Z. Raspopović, V. Stojanović, Acta Phys. Pol. A 132, 1420 (2017)
Ž. Nikitović, Z. Raspopović, V. Stojanović, Plasma Sources Sci. Technol. 26, 044004 (2017)
V. Stojanović, Z. Raspopović, J. Jovanović, Ž. Nikitović, Z.Lj Petrović, EPL 101, 45003 (2013)
M.A. Lieberman, A.J. Lichtenberg, Principles of Plasma Discharges and Materials Processing (Wiley, New York, 1994)
A. Kaboth, J. Monroe, S. Ahlen, D. Dujmić, S. Henderson, G. Kohse, R. Lanza, M. Lewandowska, A. Roccaro, G. Sciolla, N. Skvorodnev, H. Tomita, R. Vanderspek, H. Wellenstein, R. Yamamoto, P. Fisher, Nucl. Instrum. Methods Phys. Res. 592, 63–72 (2008)
E. Parker, F.S.M. El-Ashhab, Int. J. Mass Spectrom. Ion Phys. 47, 159 (1983)
A.V. Phelps, J. Appl. Phys. 76, 747 (1994)
B.-W. Koo, Z. Fang, L. Godet, S.B. Radovanov, C. Cardinaud, G. Cartry, A. Grouillet, D. Lenoble, IEEE Trans. Plasma Sci. 32, 456 (2004)
Ž. Nikitović, S. Radovanov, L. Godet, Z. Raspopović, O. Šašić, V. Stojanović, Z.Lj Petrović, EPL 95, 45003 (2011)
Phelps A. database, private communication (2019) www.lxcat.net. Accessed 4 Feb 2019
Z. Lj Petrović, V.D. Stojanović, J. Vac. Sci. Technol. 16, 329 (1998)
G.K. Jarvis, R.A. Kennedy, C.A. Mayhew, R.P. Tuckett, Int. J. Mass Spectrom. 202, 323 (2000)
R.E. Robson, Aust. J. Phys. 44, 685 (1991)
Z. Raspopović, S. Sakadžić, Z. Lj Petrović, T. Makabe, J. Phys. D 33, 1298 (2000)
Ž. Nikitović, V. Stojanović, Z. Raspopović, Acta Phys. Pol. A 134, 1134 (2018)
Ž. Nikitović, Z. Raspopović, V. Stojanović, Eur. Phys. J. D 72, 168 (2018)
Z. Ristivojević, Z. Lj Petrović, Plasma Sources Sci. Technol. 21, 035001 (2012)
Ž Nikitović, M. Gilić, J. Mitrić, Z. Raspopović, SPIG, Belgrade, Serbia 24–28, 79 (2020)
Acknowledgements
The author acknowledge funding provided by the Institute of Physics University Belgrade, through the grant by the Ministry of Education, Science and Technological Development of the Republic of Serbia.
Author information
Authors and Affiliations
Contributions
Z̆eljka Nikitović - Thematic direction of research and work coordination. Organization and writing of the paper, calculation of endothermic and exothermic collisions. Zoran Raspopović - Monte Carlo simulations for cases where endothermic and exothermic collisions are included, graphical presentation.
Corresponding author
Rights and permissions
About this article
Cite this article
Nikitović, Ž.D., Raspopović, Z.M. Rate coefficients for \(\hbox {Ar}^{{\mathbf {+}}}\) in \(\hbox {Ar/BF}_{{\mathbf {3}}}\) mixtures. Eur. Phys. J. D 75, 118 (2021). https://doi.org/10.1140/epjd/s10053-021-00061-3
Received:
Accepted:
Published:
DOI: https://doi.org/10.1140/epjd/s10053-021-00061-3