Skip to main content
SpringerLink
Log in

A Selective BP/Si Contact Formed by Low-Temperature Plasma-Enhanced Atomic Layer Deposition

  • Published:
Technical Physics Letters Aims and scope Submit manuscript

Abstract

It is shown for the first time that thin boron phosphide (BP) layers on silicon substrates can be formed by low-temperature plasma-enhanced atomic layer deposition at 250°C. Experiments demonstrated the possibility of using these BP/Si interfaces as selective hole contacts to silicon in solar cells.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1.
Fig. 2.
Fig. 3.

Similar content being viewed by others

REFERENCES

  1. K. Yoshikawa, H. Kawasaki, W. Yoshida, T. Irie, K. Konishi, K. Nakano, T. Uto, D. Adachi, M. Kanematsu, H. Uzu, and K. Yamamoto, Nat. Energy 2, 17032 (2017). https://doi.org/10.1038/nenergy.2017.32

    Article  ADS  Google Scholar 

  2. J. Bullock, M. Hettick, J. Geissbühler, J. Alison, T. Allen, C. Sutter-Fella, T. Chen, H. Ota, E. Schaler, S. Wolf, C. Ballif, C. Cuevas, and A. Javey, Nat. Energy 1, 15031 (2016). https://doi.org/10.1038/nenergy.2015.31

    Article  ADS  Google Scholar 

  3. Y. Kumashiro, Y. Okada, and S. Gonda, J. Cryst. Growth 70, 507 (1984). https://doi.org/10.1016/0022-0248(84)90309-9

    Article  ADS  Google Scholar 

  4. S. W. King, M. French, M. Jaehnig, M. Kuhn, and G. Xu, ECS J. Solid State Sci. Technol. 1, 250 (2012). https://doi.org/10.1149/2.007206jss

    Article  Google Scholar 

  5. H. Wagner, T. Ohrdes, A. Dastgheib-Shirazi, B. Puthen-Veettil, D. König, and P. P. Altermatt, J. Appl. Phys. 115, 044508 (2014). https://doi.org/10.1063/1.4863464

    Article  ADS  Google Scholar 

  6. I. Sakata and H. Kawanami, Appl. Phys. Express 1, 091201 (2008). https://doi.org/10.1143/apex.1.091201

    Article  ADS  Google Scholar 

  7. R. Varache, C. Leendertz, M. E. Gueunier-Farret, J. Haschke, D. Muñoz, and L. Korte, Sol. Energy Mater. Sol. Cells 141, 14 (2015). https://doi.org/10.1016/j.solmat.2015.05.014

    Article  Google Scholar 

  8. X.-L. Wang, A. Wakahara, and A. Sasaki, J. Cryst. Growth 158, 49 (1996). https://doi.org/10.1016/0022-0248(95)00341-X

    Article  ADS  Google Scholar 

  9. T. L. Chu, J. M. Jackson, A. E. Hyslop, and S. C. Chu, J. Appl. Phys. 42, 420 (1971). https://doi.org/10.1063/1.1659614

    Article  ADS  Google Scholar 

  10. B. Stone and D. Hill, Phys. Rev. Lett. 4, 282 (1960). https://doi.org/10.1103/PhysRevLett.4.282

    Article  ADS  Google Scholar 

  11. A. Gudovskikh, I. Morozov, A. Uvarov, D. Kudryashov, E. Nikitina, A. Bukatin, V. Nevedomskiy, and J.-P. Kleider, J. Vac. Sci. Technol. A 36, 021302 (2018). https://doi.org/10.1116/1.4999409

    Article  Google Scholar 

  12. A. S. Gudovskikh, A. V. Uvarov, I. A. Morozov, A. I. Baranov, D. A. Kudryashov, K. S. Zelentsov, A. Jaffré, S. le Gall, A. Darga, A. Brézard-Oudot, and J.-P. Kleider, Phys. Status Solidi A 216, 1800617 (2019). https://doi.org/10.1002/pssa.201800617

    Article  ADS  Google Scholar 

  13. K. Woo, K. Lee, and K. Kovnir, Mater. Res. Express 3, 074003 (2016). https://doi.org/10.1088/2053-1591/3/7/074003

    Article  ADS  Google Scholar 

Download references

Funding

This work was supported in part by the Ministry of Science and Higher Education of the Russian Federation, state assignment no. 0791-2020-0004.

Author information

Authors and Affiliations

  1. Zh.I. Alferov St. Petersburg National Research Academic University, Russian Academy of Sciences, 194021, St. Petersburg, Russia

    A. S. Gudovskikh, D. A. Kudryashov, A. I. Baranov, A. V. Uvarov & I. A. Morozov

  2. St. Petersburg Electrotechnical University “LETI”, 197376, St. Petersburg, Russia

    A. S. Gudovskikh

Authors
  1. A. S. Gudovskikh
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. D. A. Kudryashov
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. A. I. Baranov
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. A. V. Uvarov
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. I. A. Morozov
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to A. S. Gudovskikh.

Ethics declarations

The authors declare that they have no conflict of interest.

Additional information

Translated by P. Pozdeev

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Gudovskikh, A.S., Kudryashov, D.A., Baranov, A.I. et al. A Selective BP/Si Contact Formed by Low-Temperature Plasma-Enhanced Atomic Layer Deposition. Tech. Phys. Lett. 47, 96–98 (2021). https://doi.org/10.1134/S1063785021010211

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S1063785021010211

Keywords:

Search

Navigation