Abstract
The possibilities of using medium-energy (hundreds of kiloelectronvolts) ion beams for diagnostics of solids by measuring the spectra of characteristic X-ray radiation are considered. A modification of the method is proposed that consists in using probing beams of neutral atoms. It is shown that the use of such beams makes it possible to eliminate the negative effect of the surface potential caused by the charge accumulation when working with dielectric samples.
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The work was carried out within the framework of a state order, topic no. 0040-2019-0023.
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Translated by E. Chernokozhin
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Serenkov, I.T., Sakharov, V.I. The Use of Medium-Energy Atom Beams for Solid-State PIXE Diagnostics. Tech. Phys. 66, 155–160 (2021). https://doi.org/10.1134/S1063784221010175
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DOI: https://doi.org/10.1134/S1063784221010175