1 Correction to: Microsystem Technologies https://doi.org/10.1007/s00542-020-05085-0

Unfortunately, The line for one of the graphs (Mean Voltage vs Time for Displacement Feedback) in Fig. 14 does not appear in the published manuscript. The corrected figure is given below.

Fig. 14
figure 14

Step response for displacement feedback and self-sensing feedback system with pre-loading of 700 g