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Laser Formation of Holes in Nonmetallic Substrates

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Abstract

The use of a pulse picosecond laser with a wavelength of 532 nm and frequency of 15 Hz in the formation of holes with diameters up to 0.1 mm in nonmetallic substrates (silicon, ceramics, etc.) was proposed. It was found by modeling in MathCAD and COMSOL Multiphysics that the half-angle value of the light cone aperture that depends on the focusing of laser radiation exerts a significant effect on the depth and diameter of holes in laser processing. The influence of the regimes of laser processing employing nanosecond and picosecond lasers with wavelengths of 1064 and 532 nm, respectively, on the conicity and time of formation of holes in silicon substrates was investigated. The preliminary heating of the substrate to 170–200°С reduces the time of formation of the holes by 20%.

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REFERENCES

  1. Mukhina, E. and Bashta, P., Elektron. Nauka, Tekhnol., Biz., 2009, no. 2, pp. 92–93.

  2. Wolfgang, S. and Reinhart, P., J. Laser Appl., 2013, vol. 25, pp. 3–22. https://doi.org/10.2351/1.4773837

    Article  Google Scholar 

  3. Kreutz, E.W., Horn, A., and Poprawe, R., Appl. Surf. Sci., 2005, vol. 248, nos. 1–4, pp. 66–70. https://doi.org/10.1016/j.apsusc.2005.03.034

    Article  Google Scholar 

  4. Vaks, E.D., Milen’kii, M.N., and Saprykin, L.G., Praktika pretsizionnoi lazernoi obrabotki (Practical Manual on Precise Laser Processing), Moscow: Tekhnosfera, 2013.

  5. Veiko, V.P., Libenzon, M.N., Chervyakov, G.G., and Yakovlev, E.B., Vzaimodeistvie lazernogo izlucheniya s veshchestvom (Interaction of Laser Radiation with Substance), Moscow: Fizmatlit, 2008.

  6. Madou, M.J., Fundamentals of Microfabrication and Nanotechnology, vol. 2: Manufacturing Techniques for Microfabrication and Nanotechnology, Boca Raton, FL: CRC, 2011.

    Book  Google Scholar 

  7. Sokolova, T.N. and Surmenko, L.A., in Obzory po elektronnoi tekhnike. Tekhnologiya, organizatsiya proizvodstva i oborudovanie (Review on Electronic Engineering: Technology, Organization of Production, and Equipment), Moscow: Elektronika, 1986.

  8. Lanin, V.L., Volk, S.A., and Pervenetskii, A.P., Tekhnol. Elektron. Prom-sti, 2019, no. 2, pp. 57–59.

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Authors and Affiliations

  1. State University of Informatics and Radioelectronics of Belarus, 220013, Minsk, Republic of Belarus

    V. L. Lanin, Van Tung Fam & N’yan Dat Chan

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  1. V. L. Lanin
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  2. Van Tung Fam
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  3. N’yan Dat Chan
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Correspondence to V. L. Lanin.

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Translated by T. Shemyakova

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Lanin, V.L., Fam, V.T. & Chan, N.D. Laser Formation of Holes in Nonmetallic Substrates. Surf. Engin. Appl.Electrochem. 56, 754–761 (2020). https://doi.org/10.3103/S1068375520060101

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  • DOI: https://doi.org/10.3103/S1068375520060101

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