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Investigation of the Processes of the Formation of a Nonequilibrium Phase-Structural State in FeTiB Films Obtained by Magnetron Sputtering

  • NANOSTRUCTURED MATERIALS AND FUNCTIONAL COATINGS
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Abstract

The main trends in the modern development of magnetic microelectronics are miniaturization and operation speed, while ensuring efficient operation in the MHz and GHz frequency ranges of magnetic fields. Creating new magnetic materials characterized by properties providing these trends is the most important fundamental and applied problem of materials science. In this regard, nanocrystalline soft magnetic alloys belonging to Fe–Me–X systems (Me is one of the metals of the IVb group of the periodic table; X is one of the light elements N, C, O, or B) obtained in the form of films attract great attention. Such films produced by magnetron sputtering and characterized by the Fe/MeX two-phase structure are capable, as was shown earlier by the authors of the present article using the example of Fe–Zr–N films, of providing a combination of high saturation induction Bs, low coercive field Hc, and high hardness and thermal stability of the structure. The films were prepared by magnetron sputtering. In accordance with the initial data obtained by the authors, the films of the FeTiB system can provide better properties as compared with FeZrN films. The published data on FeTiB films in the context of their application in microelectronic devices are very sparse. In the present work we continue studies of FeTiB films aimed at identifying the chemical and phase composition providing the level of properties required for the application of the films in microelectronics. The nanocrystalline films containing from 0 to 14.3 at % Ti and from 0 to 28.9 at % B are obtained by DC magnetron sputtering. The phase-structural state of the films is studied by X-ray diffraction and transmission electron microscopy. According to the phase composition, all films are divided into three groups: single-phase (supersaturated solid solution of Ti in α-Fe), two-phase (α-Fe(Ti)/αTi, α-Fe(Ti)/TiB2, α-Fe(Ti)/FeTi, and α‑Fe(Ti)/Fe2B), and XRD amorphous. The XRD amorphous films are shown to be characterized by a mixed structure made of a solid solution α-Fe(Ti) with a grain size in the range from 0.7 to 2 nm and an amorphous phase. A reasonable assumption has been made that the amorphous phase is enriched by boron. A quantitative assessment of the grain size of the α-Fe(Ti) phase and its dependence on the chemical and phase composition of the films is given. The mechanisms of solid-solution and dispersion strengthening determine the grain size of this phase.

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REFERENCES

  1. Yoshizawa, Y., Oguma, S., and Yamauchi, K., New Fe-based soft magnetic alloys composed on ultrathin grain structure, J. Appl. Phys., 1988, vol. 64, pp. 6044–6046.

    Article  CAS  Google Scholar 

  2. McHenry, M.E. and Laughlin, D.E., Nano-scale materials development for future magnetic applications, Acta Mater., 2000, vol. 48, pp. 223–238.

    Article  CAS  Google Scholar 

  3. Nago, K., Sakakima, H., and Ihara, K., Microstructures and magnetic properties of Fe-(Ta,Nb,Zr)-N alloy films, IEEE Transl. J. Magn. Jpn., 1992, vol. 7, no. 2, pp. 119–127.

    Article  Google Scholar 

  4. Chakraborty, A., Mountfield, K.R., Bellesis, G.H., Lambeth, D.N., and Kryder, M.H., Search for high moment soft magnetic materials: FeZrN, J. Appl. Phys., 1996, vol. 80, pp. 10–12.

    Article  Google Scholar 

  5. Viala, B., Minor, M.K., and Barnard, J.A., Microstructure and magnetism in FeTaN films deposited in the nanocrystalline state, J. Appl. Phys, 1996, vol. 80, pp. 39–41.

    Article  Google Scholar 

  6. Rask, M.T. and Longworth, L.L., US Patent 5001589A, 1991.

  7. Bannykh, O.A., Sheftel’, E.N., Kaputkin, D.E., Strug, R.E., Usmanova, G.Sh., and Zubov, V.E., Report on the Contract IMET-Philips PLW-938018-D-WZ-86512, 1995.

  8. Sheftel, E.N., Soft magnetic nanocrystalline films of alloys of Fe-refractory interstitial phase for application in devices for magnetic recording, Inorg. Mater.: Appl. Res., 2010, vol. 1, no. 1, pp. 17–24.

    Article  Google Scholar 

  9. Bannykh, O.A., Sheftel’, E.N., Grigorovich, V.K., Strug, R.E., Mkrtumov, A.S., Polyukhova, I.R., and Evdokimov, A.V., RF Patent 4775860/02, 1992.

  10. Grigorovich, V.K., Sheftel’, E.N., Strug, R.E., and Polyukhova, I.R., Precipitation hardening of a sendust-type alloy by means of boride additives, Izv. Akad. Nauk SSSR. Met., 1993, no. 6, pp. 173–177.

  11. Sheftel, E.N., Tedzhetov, V.A., Harin, E.V., Usmanova, G.S., and Kiryukhantsev-Korneev, F.V., High-induction nanocrystalline soft magnetic FexTiyBz films prepared by magnetron sputtering, Phys. Status Solidi C, 2016, vol. 13, nos. 10–12, pp. 965–971.

    Article  CAS  Google Scholar 

  12. Tanaka, K. and Saito, T., Phase equilibria in TiB2-reinforced high modulus steel, J. Phase Equilib., 1999, vol. 20, no. 3, pp. 207–214.

    Article  CAS  Google Scholar 

  13. Raghavan, V., B-Fe-Ti (boron-iron-titanium), J. Phase Equilib., 2003, vol. 24, no. 5, pp. 455–456.

    Article  CAS  Google Scholar 

  14. Levashov, E.A., Shtansky, D.V., Kiryukhantsev-Korneev, Ph.V., Petrzhik, M.I., Tyurina, M.Ya., and Sheveyko, A.N., Multifunctional nanostructured coatings: formation, structure, and the uniformity of measuring their mechanical and tribological properties, Russ. Metall. (Engl. Transl.), 2010, vol. 10, pp. 917–935.

  15. Shelekhov, E.V. and Sviridova, T.A., Programs for X‑ray analysis of polycrystals, Met. Sci. Heat Treat., 2000, vol. 42, nos. 7–8, pp. 309–313.

    Article  CAS  Google Scholar 

  16. Kitaigorodskii, A.I., Rentgenostrukturnyi analiz melkokristallicheskikh i amorfnykh tel (X-Ray Structural Analysis of Fine-Crystalline and Amorphous Solids), Moscow-Leningrad: Gostekhizdat, 1952.

  17. Diagrammy sostoyaniya dvoinykh metallicheskikh sistem (Phase Diagrams of Binary Metallic Systems), Lyakishev, N.P., Ed., Moscow: Mashinostroenie, 1997.

    Google Scholar 

  18. Hume-Rothery, W. and Raynor, G.V., The Structure of Metals and Alloys, London: Institute of Metals, 1956.

    Google Scholar 

  19. Grigorovich, V.K., Elektronnoe stroenie i termodinamika splavov zheleza (Electronic Structure and Thermodynamics of Iron Alloys), Moscow: Nauka, 1970.

  20. Makino, A., Yamamoto, Y., Hirotsu, Y., Inoue, A., and Masumoto, T., Microstructure of nanocrystalline b.c.c. FeMB(MNb,Hf) soft magnetic alloys, Mater. Sci. Eng., A, 1994, vols. 179–180, pp. 495–500.

    Article  Google Scholar 

  21. Makino, A., Suzuki, K., Inoue, A., Hirotsu, Y., and Masumoto, T., Magnetic properties and microstructure of nanocrystalline bcc Fe–M–B (M = Zr, Hf, Nb) alloys, J. Magn. Magn. Mater., 1994, vol. 133, pp. 329–333.

    Article  CAS  Google Scholar 

  22. Makino, A., Yoshida, S., and Masumoto, T., Microstructure and magnetic properties of nanocrystalline bcc Fe–Nb–B soft magnetic alloys, IEEE Trans. Magn., 1994, vol. 30, no. 6, pp. 4848–4850.

    Article  CAS  Google Scholar 

  23. Makino, A., Inoue, A., and Masumoto, T., Soft magnetic properties of nanocrystalline Fe–M–b (M = Zr, Hf, Nb) alloys with high magnetization, Nanostruct. Mater., 1995, vol. 6, pp. 985–988.

    Article  Google Scholar 

  24. Makino, A., Inoue, A., and Masumoto, T., Nanocrystalline soft-magnetic Fe–M–B (M = Zr, Hf, Nb) alloys produced by crystallization of amorphous phase, Mater. Trans., JIM, 1995, vol. 36, no. 7, pp. 924–938.

    CAS  Google Scholar 

  25. Makino, A., Hatanai, T., Inoue, A., and Masumoto, T., Nanocrystalline soft magnetic Fe–M–B (M = Zr, Hf, Nb) alloys and their applications, Mater. Sci. Eng., A, 1997, vols. 226–228, pp. 594–602.

    Article  Google Scholar 

  26. Makino, A., Bitoh, T., Kojima, A., Inoue, A., and Masumoto, T., Magnetic properties of zero-magnetostrictive nanocrystalline Fe–Zr–Nb–B soft magnetic alloys with high magnetic induction, J. Magn. Magn. Mater., 2000, vols. 215–216, pp. 288–292.

    Article  Google Scholar 

  27. Makino, A., Bitoh, T., Kojima, A., Inoue, A., and Masumoto, T., Compositional dependence of the soft magnetic properties of the nanocrystalline Fe–Zr–Nb–B alloys with high magnetic flux density, J. Appl. Phys., 2000, vol. 87, no. 9, pp. 7100–7102.

    Article  CAS  Google Scholar 

  28. Gorshenkov, M.V., Glezer, A.M., Korchuganova, O.A., Aleev, A.A., and Shurygina, N.A., Effect of γ-(Fe,Ni) crystal-size stabilization in Fe–Ni–B amorphous ribbon, Phys. Met. Metallogr., 2017, vol. 118, no. 2, pp. 176–182.

    Article  CAS  Google Scholar 

  29. Rickerby, D.S., Lattice parameters of iron-titanium solid solutions, Met. Sci., 1982, vol. 16, no. 10, pp. 495–496.

    Article  CAS  Google Scholar 

  30. Hwang, J.W., Thermal expansion of nickel and iron, and the influence of nitrogen on the lattice parameter of iron at the Curie temperature, MSc Thesis, Univ. of Missouri-Rolla, 1972.

  31. Senkov, O.N., Chakoumakos, B.C., Jonas, J.J., and Froes, F.H., Effect of temperature and hydrogen concentration on the lattice parameter of beta titanium, Mater. Res. Bull., 2001, vol. 36, pp. 1431–1440.

    Article  CAS  Google Scholar 

  32. Rickerby, D.S., Jones, A.M., and Bellamy, B.A., X-ray diffraction studies of physically vapor-deposited coatings, Surf. Coat. Technol., 1989, vol. 37, no. 1, pp. 111–137.

    Article  CAS  Google Scholar 

  33. Vaz, F., Rebouta, L., Goudeau, Ph., Girardeau, T., Pacaud, J., Riviére, J.P., and Traverse, A., Structural transitions in hard Si-based TiN coatings: The effect of bias voltage and temperature, Surf. Coat. Technol., 2001, vols. 146–147, pp. 274–279.

    Article  Google Scholar 

Download references

Funding

This work was supported by the Russian Foundation for Basic Research (project no. 18-03-00502). Electron microscopy was carried out using the instrumentation at the Center of Shared Facilities of the Shubnikov Institute of Crystallography, Russian Academy of Sciences (project RFMEFI62119X0035), under the auspices of the state contract of the Federal Research Center Crystallography and Photonics (Russian Academy of Sciences) and supported by the Ministry of Science and Higher Education of the Russian Federation.

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Authors and Affiliations

  1. Baikov Institute of Metallurgy and Materials Science, Russian Academy of Sciences, 119334, Moscow, Russia

    E. N. Sheftel, V. A. Tedzhetov, E. V. Harin & G. Sh. Usmanova

  2. National University of Science and Technology “MISIS”, 119049, Moscow, Russia

    Ph. V. Kiryukhantsev-Korneev

  3. Federal Scientific Research Center Crystallography and Photonics, Shubnikov Institute of Crystallography, Russian Academy of Sciences, 119333, Moscow, Russia

    O. M. Zhigalina

  4. Bauman State Technical University, 105005, Moscow, Russia

    O. M. Zhigalina

Authors
  1. E. N. Sheftel
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  2. V. A. Tedzhetov
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  3. Ph. V. Kiryukhantsev-Korneev
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  4. E. V. Harin
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  5. G. Sh. Usmanova
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  6. O. M. Zhigalina
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Correspondence to V. A. Tedzhetov.

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Translated by S. Efimov

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Sheftel, E.N., Tedzhetov, V.A., Kiryukhantsev-Korneev, P.V. et al. Investigation of the Processes of the Formation of a Nonequilibrium Phase-Structural State in FeTiB Films Obtained by Magnetron Sputtering. Russ. J. Non-ferrous Metals 61, 753–761 (2020). https://doi.org/10.3103/S1067821220060206

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