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Mechanical Properties and Heat Resistance of Ta–Zr–Si–B–C–N Coatings Obtained upon the Magnetron Sputtering of the TaZrSiB Target in Ar, N2, and C2H4 Atmosphere

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Russian Journal of Non-Ferrous Metals Aims and scope Submit manuscript

Abstract

Ta–Zr–Si–B–C–N coatings are obtained by magnetron sputtering in argon, nitrogen, and ethylene atmosphere. The structure of the coatings is analyzed by scanning electron microscopy and energy dispersive and X-ray phase analysis. The mechanical properties of the coatings are determined by nanoindentation. Tribological tests are performed using a Tribometer automated testing machine under a load of 1 N. Wear tracks are analyzed using an optical profile meter. The heat resistance of the coatings is studied at 1000°C. It is established that the coatings obtained in argon are characterized by the highest hardness (30 GPa) and elastic recovery (79%). Moreover, they can be resistant against oxidation up to 1000°C inclusively, which is attributed to the protective film formed on their surface comprised of silicon and tantalum oxides. Reactive coatings obtained in nitrogen are characterized by lower heat resistance in comparison with nonreactive coatings, being completely oxidized by 1000°C. However, they have a low coefficient of friction: less than 0.15.

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ACKNOWLEDGMENTS

We thank MISiS members P. Loginov, N.V. Shvyndina, and M.I. Petrzhik for their assistance in carrying out X-ray phase analysis, SEM, and nanoindentation measurements.

Funding

This work was supported by the Russian Science Foundation, project no. 19-19-00117.

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Authors and Affiliations

  1. National University of Science and Technology “MISiS”, 119049, Moscow, Russia

    Ph. V. Kiryukhantsev-Korneev, A. D. Sytchenko, E. A. Levashov & T. A. Lobova

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  1. Ph. V. Kiryukhantsev-Korneev
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  2. A. D. Sytchenko
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  3. E. A. Levashov
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  4. T. A. Lobova
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Correspondence to Ph. V. Kiryukhantsev-Korneev.

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Translated by I. Moshkin

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Kiryukhantsev-Korneev, P.V., Sytchenko, A.D., Levashov, E.A. et al. Mechanical Properties and Heat Resistance of Ta–Zr–Si–B–C–N Coatings Obtained upon the Magnetron Sputtering of the TaZrSiB Target in Ar, N2, and C2H4 Atmosphere. Russ. J. Non-ferrous Metals 61, 732–738 (2020). https://doi.org/10.3103/S1067821220060103

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