Skip to main content
Log in

Monitoring the Fractional Distillation Purification of Inorganic Hydrides by Diode Laser Absorption Spectroscopy

  • Published:
Inorganic Materials Aims and scope

Abstract—

We present our findings on the use of diode laser spectroscopy (DLS) for monitoring СО2, Н2О, СН4, C2H2, C2H4, NH3, and other gas impurities during low-temperature fractional distillation purification of gaseous hydrides. We demonstrate a lineup of instruments and techniques for continuously monitoring impurities during purification of hydrides: NH3, AsH3, РН3, and SiH4. The IR sources used are distributed feedback diode lasers (DLs) having a single mode output fiber pigtail and covering the near-IR spectral region, from 0.7 to 2.0 μm, where overtone and combination absorption bands of the impurities of interest are located. The systems offer high sensitivity and speed in impurity concentration measurements. Owing to their small size and low energy consumption, they can readily be integrated into a process equipment (components of fractionation columns) and enable prolonged continuous monitoring of the purity of hydrides. We describe gas concentration measurement techniques that use conventional high-resolution differential absorption spectroscopy and new, modulation correlation approaches for monitoring a weak molecular absorption by an impurity of interest against a strong selective absorption background of a matrix substance (hydride under study). We present results of technological experiments concerned with the low-temperature fractional distillation of hydrides and the degree of impurity removal from them as monitored by DLS.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Fig. 1.
Fig. 2.
Fig. 3.
Fig. 4.
Fig. 5.
Fig. 6.
Fig. 7.

Similar content being viewed by others

REFERENCES

  1. Ponurovskiy, Ya.Ya., A new generation of diode laser-based gas analysis systems, Analitika, 2019, vol. 9, no. 1, pp. 68–74.

    Google Scholar 

  2. Kotkov, A.P., Ivanov, V.A., Grishnova, N.D., et al., Results of TDLS application for ammonia monitoring in a process of high-purity arsine and phosphine production, Appl. Phys. B, 2010, vol. 100, pp. 391–396.

    Article  CAS  Google Scholar 

  3. Berezin, A.G., Nadezhdinskii, A.I., Stavrovskii, D.B., Vyazov, I.E., Kotkov, A.P., Ivanov, V.A., Grishnova, N.D., Ponurovskiy, I.I., Polezhaev, D.M., and Sidorov, V.A., Detection of water content in high-purity ammonia by means of diode-laser spectroscopy, Appl. Phys. B, 2008, vol. 90, pp. 317–322.

    Article  CAS  Google Scholar 

  4. Sozin, A.Yu., Gas chromatography/mass spectrometry determination of molecular impurities in isotopically natural and enriched high-purity volatile inorganic hydrides, Doctoral (Chem.) Dissertation, Nizhny Novgorod, 2019.

  5. Buzynin, Yu.N., Gusev, S.A., Danil’tsev, V.M., Drozdov, M.N., Drozdov, Yu.N., Murel’, A.V., Khrykin, O.I., and Shashkin, V.I., Single-crystalline GaAs, AlGaAs, and InGaAs layers grown by metalorganic VPE on porous GaAs substrates, Tech. Phys. Lett., 2000, vol. 26, no. 7, pp. 298–301.

    Article  CAS  Google Scholar 

  6. Blank, T.V. and Gol’dberg, Yu.A., Semiconductor photoelectric converters for the ultraviolet region of the spectrum, Semiconductors, 2003, vol. 37, no. 9, pp. 999–1031.

    Article  CAS  Google Scholar 

  7. Varganova, V.S. Kravchenko, N.V., Patrin, V.M., Trishenkov, M.A., Khakuashev, P.E., and Chinareva, I.V., Specific features of the spectral characteristic of ultraviolet Schottky barrier-based GaP photodiodes, Prikl. Fiz., 2015, no. 1, pp. 80–82.

  8. http://www.dls.gpi.ru/rus/sem/22/4.pdf

  9. Krylov, V.A., Analysis of high-purity volatile compounds, J. Anal. Chem., 2002, vol. 57, no. 8, pp. 660–671.

    Article  CAS  Google Scholar 

  10. Krylov, V.A., Practical issues in analysis of high-purity volatile aggressive substances, Ross. Khim. Zh., 2002, vol. 44, no. 4, pp. 71–75.

    Google Scholar 

  11. Nikolaeva, L.G. and Agafonov, I.L., Possibilities of determining impurities in high-purity volatile inorganic substances by mass spectrometry and gas chromatography, in Poluchenie i analiz veshchestv osoboi chistoty (Preparation and Analysis of High-Purity Substances), Moscow: Nauka, 1978, pp. 168–174.

  12. Zorin, A.D., Agafonov, I.L., Larin, N.V., Kedyarkin, V.M., Frolov, I.A., Balabanov, V.V., and Kuznetsova, T.S., Analysis of volatile inorganic hydrides for trace impurities by gas chromatography and mass spectrometry, in Metody polucheniya i analiza veshchestv osoboi chistoty (Preparation and Analysis of Extrapure Substances), Moscow: Nauka, 1970, pp. 146–152.

  13. Sennikov, P.G., Kosheleva, I.A., Bulanov, A.D., Adamchik, S.A., and Ignatov, S.K., Impurity composition of isotopically enriched germane studied by high-resolution Fourier transform IR spectroscopy, Perspekt. Mater., 2011, no. 10 (special issue), pp. 93–98.

  14. Karasek, F.W. and Clement, R.E., Basic Gas Chromatography–Mass Spectrometry, Amsterdam: Elsevier, 1988.

    Google Scholar 

  15. Ivanova, N.T., Vislykh, N.A., and Voevodina, V.V., Impurity sources in the preparation of arsine and phosphine, Vysokochist. Veshchestva, 1990, no. 5, pp. 198–203.

  16. Morisaco, I., Kato, T., Ino, Y., and Schaefer, K., Trace gas detection in high purity gases for semiconductor fabrication with a new GC/MS system, Int. J. Mass Spectrom. Ion Phys., 1983, vol. 48, pp. 19–22.

    Article  Google Scholar 

  17. Cambria, T. and McManus, J., Identification and removal of impurities in silane and dichlorsilane gas streams, Solid State Technol., 1990, vol. 50, pp. 95–98.

    Google Scholar 

  18. Adamchik, S.A., Bulanov, A.D., Sennikov, P.G., Churbanov, M.F., Sozin, A.Yu., Chernova, O.Yu., Kosheleva, I.A., and Troshin, O.Yu., Ultrapurification of 76Ge-enriched GeH4 by distillation, Inorg. Mater., 2011, vol. 47, no. 7, pp. 727–729.

    Article  Google Scholar 

  19. Sennikov, P.G., Kotkov, A.P., Adamchik, S.A., Grishnova, N.D., Chuprov, L.A., and Ignatov, S.A., Impurities in monosilanes synthesized by different processes, Inorg. Mater., 2010, vol. 46, no. 4, pp. 474–479.

    Google Scholar 

  20. Nadezhdinskii, A.I. and Ponurovskii, Ya.Ya., Research on analytical use of diode laser spectroscopy at the Prokhorov General Physics Institute, Russian Academy of Sciences, Zh. Anal. Khim., 2018, vol. 73, no. 2, pp. 153–158.

    Google Scholar 

  21. Nadezhdinskii, A.I. and Ponurovskii, Ya.Ya., Diode laser spectrometer for high-precision measurements, Quantum Electron. (Moscow), 2019, vol. 49, no. 7, pp. 613–622.

    Article  CAS  Google Scholar 

  22. Gordon, I.E. Rothman, L.S., et al., The HITRAN2016 molecular spectroscopic database, J. Quant. Spectrosc. Radiat. Transfer, 2017, vol. 203, pp. 3–69.

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to A. S. Kuz’michev.

Additional information

Translated by O. Tsarev

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Ponurovskii, Y.Y., Stavrovskii, D.B., Shapovalov, Y.P. et al. Monitoring the Fractional Distillation Purification of Inorganic Hydrides by Diode Laser Absorption Spectroscopy. Inorg Mater 56, 1284–1289 (2020). https://doi.org/10.1134/S0020168520120158

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S0020168520120158

Keywords:

Navigation