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Optical properties and morphology analysis of hexagonal WO3 thin films obtained by electron beam evaporation

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Abstract

WO3 films with thicknesses between 550 and 853 nm were deposited on glass substrates using the electron beam evaporation method at room temperature. The microstructures and surface roughness of the films were studied by X-ray diffraction (XRD) and atomic force microscopy (AFM). It was observed that the crystalline structure of the WO3 thin films significantly changes from the amorphous to crystalline states with a crystalline texture, and the mosaicity and grain size dependent on the film thickness. The transmittance spectra of the obtained WO3 films were measured in the range from 340 to 850 nm, and the Swanepoel method was used to determine the refractive indices and the thicknesses of the WO3 films. The obtained optical functions reveal the highly homogeneous structure of the films.

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Neither author has a financial or proprietary interest in any material or method mentioned.

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Authors and Affiliations

  1. Department of Physics, Faculty of Science, Imam Khomeini International University, Qazvin, Iran

    Reza Shakoury

  2. Vacuum Technology Research Group, ACECR, Sharif University Branch, Tehran, Iran

    Ali Arman & Mohsen Mardani

  3. Department of Physics, Kermanshah Branch, Islamic Azad University, Kermanshah, Iran

    Sahar Rezaee

  4. Physics and Accelerators Research School, Nuclear Sciences and Technology Research Institute, Tehran, Iran

    Alireza Grayeli Korpi

  5. Faculty of Technical Sciences, University of Warmia and Mazury in Olsztyn, Oczapowskiego 11, 11-041, Olsztyn, Poland

    Sławomir Kulesza & Mirosław Bramowicz

  6. Facultad de Ciencias Físico Matemáticas (FCFM), Universidad Autónoma de Nuevo León (UANL), San Nicolás de Los Garza Nuevo León, Av. Universidad s/n, 66455, Nuevo León, Mexico

    Carlos Luna

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  1. Reza Shakoury
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Shakoury, R., Arman, A., Rezaee, S. et al. Optical properties and morphology analysis of hexagonal WO3 thin films obtained by electron beam evaporation. J Mater Sci: Mater Electron 32, 798–805 (2021). https://doi.org/10.1007/s10854-020-04858-7

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