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Modification and Polishing of the Holographic Diffraction Grating Grooves by a Neutralized Ar Ion Beam

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Abstract

We describe the method for increasing the efficiency of holographic diffraction gratings (HDGs) intended for operation in the X-ray wavelength range. We describe the procedure of processing of HDG surface for reducing the amplitude and roughness of grooves. For reducing the groove amplitude, we have used Xe ions with an energy of 600 eV, while ion polishing was performed with Ar ions having an energy of 800 eV. It is shown that, after ion polishing, the diffraction efficiency of the grating at a wavelength of 4.47 nm increases by almost four times.

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Funding

This study was performed in the framework of state order no. 0035-2014-0204 and was supported by the Russian Foundation for Basic Research, projects nos. 20-02-00708, 19-32-90154, 18-02-00588, and 18-07-00633. The research was carried out on the equipment of the Physics and Technology of Micro- and Nanostructures Center for Collective Use at the Institute for Physics of Microstructures, Russian Academy of Sciences.

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Authors and Affiliations

  1. Institute for Physics of Microstructures, Russian Academy of Sciences, 607680, Nizhny Novgorod, Russia

    S. A. Garakhin, M. V. Zorina, S. Yu. Zuev, M. S. Mikhailenko, A. E. Pestov, R. S. Pleshkov, V. N. Polkovnikov, N. N. Salashchenko & N. I. Chkhalo

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  1. S. A. Garakhin
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  2. M. V. Zorina
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  3. S. Yu. Zuev
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  4. M. S. Mikhailenko
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  5. A. E. Pestov
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  6. R. S. Pleshkov
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  7. V. N. Polkovnikov
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  8. N. N. Salashchenko
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  9. N. I. Chkhalo
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Correspondence to S. A. Garakhin.

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The authors declare that they have no conflicts of interest.

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Translated by N. Wadhwa

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Garakhin, S.A., Zorina, M.V., Zuev, S.Y. et al. Modification and Polishing of the Holographic Diffraction Grating Grooves by a Neutralized Ar Ion Beam. Tech. Phys. 65, 1780–1785 (2020). https://doi.org/10.1134/S1063784220110110

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  • DOI: https://doi.org/10.1134/S1063784220110110

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