Abstract
We have analyzed the surface and electron-transport properties of thin molybdenum epitaxial films. Experimental results are compared with available quantum models of the influence of the film surface relief on their resistance.
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REFERENCES
P. Kapur, J. P. McVittie, and K. C. Saraswat, IEEE Trans. Electron Devices 49, 590 (2002).
M. Hain, H. Körner, B. Neureither, and S. Röhl, Appl. Surf. Sci. 91 (1–4), 374 (1995). https://doi.org/10.1016/0169-4332(95)00149-2
C. Y. Pan and A. Naeemi, IEEE Electron Device Lett. 35 (2), 250 (2014).
K. Fuchs, Math. Proc. Cambridge Philos. Soc. 34, 100 (1938).
E. H. Sondheimer, Adv. Phys. 1, 1 (1952).
A. F. Mayadas and M. Shatzkes, Phys. Rev. B 1, 1382 (1970).
A. F. Mayadas, M. Shatzkes, and J. F. Janak, Appl. Phys. Lett. 14, 345 (1969).
L. A. Falkovsky, Adv. Phys. 32, 753 (1983).
Z. Tesanovic, M. V. Jaric, and S. Maekawa, Phys. Rev. Lett. 5, 2760 (1986).
N. Trivedi and N. W. Ashcroft, Phys. Rev. B 38, 12298 (1988).
N. M. Makarov, N. M. Moroz, and V. A. Yampol’skii, Phys. Rev. B 52, 6087 (1995).
G. M. Mikhailov, I. V. Malikov, and A. V. Chernykh, JETP Lett. 66 (11), 725 (1997).
S. B. Soffer, J. Appl. Phys. 38 (4), 1710 (1967).
G. Fishman and D. Calecki, Phys. Rev. B 43, 11581 (1991).
L. Sheng, D. Y. Xing, and Z. D. Wang, Phys. Rev. B 51, 7325 (1995).
R. C. Munoz, R. Y. Finger, C. D. Arenas, G. Kremer, and L. Moraga, Phys. Rev. B 66, 205401 (2002).
G. Palasantzas, Phys. Rev. B 58 (15), 9685 (1998).
G. Fischer and H. Hoffmann, Solid State Commun. 35, 793 (1980).
J. C. Hensel, R. T. Tung, J. M. Poate, and F. C. Unterwald, Phys. Rev. Lett. 54, 1840 (1985).
R. C. Munoz, G. Vidal, G. Kremer, L. Moraga, C. Arenas, and A. Concha, J. Phys.: Condens. Matter 12, 2903 (2000).
R. C. Munoz, G. Vidal, M. Mulsow, J. G. Lisoni, C. Arenas, A. Concha, F. Mora, R. Espejo, G. Kremer, L. Moraga, R. Esparza, and P. Haberle, Phys. Rev. B 62, 4686 (2000).
J. R. Sambles, K. C. Elsom, and J. D. Jarvis, Philos. Trans. R. Soc. London, Ser. A 304, 365 (1982).
L. A. Fomin, I. V. Malikov, V. Yu. Vinnichenko, K. M. Kalach, S. V. Pyatkin, and G. M. Mikhailov, J. Surf. Invest.: X-Ray, Synchrotron Neutron Tech. 2, 104 (2008). https://doi.org/10.1007/s11700-008-1015-z
I. V. Malikov and G. M. Mikhailov, J. Appl. Phys. 82 (11), 5555 (1997).
G. M. Mikhailov, A. V. Chernykh, and V. T. Petrashov, J. Appl. Phys. 80, 948 (1996).
G. M. Mikhailov, I. V. Malikov, A. V. Chernykh, and V. T. Petrashov, Phys. Solid State 38, 1754 (1996)
B. A. Loginov, P. B. Loginov, V. B. Loginov, and A. B. Loginov, Nanoindustriya, No. 6, 32 (2019).
Gwyddion—Free SPM (AFM, SNOM/NSOM, STM, MFM) Data Analysis Software, http://gwyddion.net. Accessed March 5, 2020.
G. Bergman, Phys. Rep. 107 (1), 1 (1984).
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Fomin, L.A., Malikov, I.V., Berezin, V.A. et al. Probe Microscopy and Electron-Transport Properties of Thin Mo Epitaxial Films on Sapphire. Tech. Phys. 65, 1748–1754 (2020). https://doi.org/10.1134/S1063784220110080
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DOI: https://doi.org/10.1134/S1063784220110080