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Chemical Vapor Deposition of an Iridium Phase on Hafnium Carbide and Tantalum Carbide

  • INORGANIC MATERIALS AND NANOMATERIALS
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Abstract

Nanocrystalline iridium coatings on hafnium carbide and tantalum carbide substrates are prepared by chemical vapor deposition (MOCVD) at 600°С. Subsequent high-temperature treatment at 1100°С gives rise to chemical reactions between iridium and hafnium carbide or tantalum carbide to yield nanosized substitutional intermetallic solid solutions MIr3 – x and evolve free carbon. The occurrence of intermetallic interaction is proved by X-ray photoelectron (XPS) spectroscopy.

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REFERENCES

  1. E. P. Simonenko, N. P. Simonenko, A. S. Lysenko, et al., Zh. Neorg. Khim. 65, 420 (2020). https://doi.org/10.31857/S0044457X20030149

    Article  Google Scholar 

  2. E. P. Simonenko, N. P. Simonenko, M. I. Petrichko, et al., Zh. Neorg. Khim. 64, 1127 (2019). https://doi.org/10.1134/S0044457X19110199

    Google Scholar 

  3. E. P. Simonenko, N. P. Simonenko, V. G. Sevastyanov, et al., Russ. J. Inorg. Chem. 61, 1203 (2016). https://doi.org/10.1134/S003602361610017X.

    Article  CAS  Google Scholar 

  4. C. Musa, R. Licheri, R. Orru, et al., Sol. En. 169, 111 (2018). https://doi.org/10.1016/j.solener.2018.04.036

    Article  CAS  Google Scholar 

  5. E. Sani, L. Mercatelli, D. Fontani, et al., J. Renewable Sustainable En. 3, 063 107 (2011). https://doi.org/10.1063/1.3662099

    Article  CAS  Google Scholar 

  6. W. A. Mackie, J. M. Lovell, and G. G. Magera, IVESC 2012 (IEEE, Monterey, CA, 2012), p. 129. https://doi.org/10.1109/IVESC.P.2012.6264168

  7. W. S. Hwang, D. Chan, and B. J. Cho, IEEE Trans. Electron Dev. 55, 2469 (2008). https://doi.org/10.1109/TED.2008.927946

    Article  CAS  Google Scholar 

  8. Kh. S. Kan and B. S. Kul’varskaya, Zh. Tekh. Fiz. 43, 1269 (1973).

    CAS  Google Scholar 

  9. V. V. Lozanov, N. I. Baklanova, N. V. Bulina, et al., ACS Appl. Mater. Interfaces 10, 13 062 (2018). https://doi.org/10.1021/acsami.8b01418

  10. N. I. Baklanova, V. V. Lozanov, and A. T. Titov, Corros. Sci. 143, 337 (2018). https://doi.org/10.1016/j.corsci.2018.08.044

    Article  CAS  Google Scholar 

  11. V. Yu. Vasilyev, N. B. Morozova, T. V. Basova, et al., RSC Adv. 5, 32 034 (2015). https://doi.org/10.1039/C5RA03566J

    Article  CAS  Google Scholar 

  12. C. K. Jun and P. T. B. Shaffer, J. Less-Common Met. 24 (3), 323 (1971). https://doi.org/10.1016/0022-5088(71)90113-5

    Article  CAS  Google Scholar 

  13. J. J. Halvorson and R. T. Wimber, J. Appl. Phys. 43, 2519 (1972). https://doi.org/10.1063/1.1661553

    Article  CAS  Google Scholar 

  14. R. T. K. Baker and R. D. Sherwood, J. Catal. 61, 378 (1980). https://doi.org/10.1016/0021-9517(80)90385-1

    Article  CAS  Google Scholar 

  15. R. F. Fisher, M. D. Alvey, and P. M. George, J. Vac. Sci. Technol. A 10, 2253 (1992). https://doi.org/10.1116/1.577927

    Article  CAS  Google Scholar 

  16. H. Wang and E. A. Carter, J. Am. Chem. Soc. 115, 2357 (1993). https://doi.org/10.1021/ja00059a034

    Article  CAS  Google Scholar 

  17. C. D. Wagner, The NIST X-ray Photoelectron Spectroscopy (XPS) Database (Natl. Inst. Stand. Technol., Oakland, 1991). https://nvlpubs.nist.gov/nistpubs/Legacy/TN/nbstechnicalnote1289.pdf.

  18. A. V. Naumkin, A. Kraut-Vass, S. W. Gaarenstroom, and C. J. Powell, NIST Standard Reference Database, Version 4.1 (2012). https://doi.org/10.18434/T4T88K

  19. J.-Ch. Dupin, D. Gonbeau, P. Vinatier, et al., Phys. Chem. Chem. Phys. 2, 1319 (2000). https://doi.org/10.1039/A908800H

    Article  CAS  Google Scholar 

  20. F. Huang, Z. Wan, Y. Jin, et al., J. Electrochem. Soc. B 164, 632 (2017). https://doi.org/10.1149/2.0641713jes

    Article  CAS  Google Scholar 

  21. I. Bertóti, M. Mohai, A. Csanády, et al., Surf. Interface Anal. 19, 457 (1992). https://doi.org/10.1002/sia.740190186

    Article  Google Scholar 

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ACKNOWLEDGMENTS

The authors are grateful to A.V. Ukhina, PhD for measuring X-ray diffraction patterns, to A.V. Utkin, PhD for his help in preparing carbide pellets, and to the Shared Facilities Center of the Institute of Catalysis, Siberian Branch of the Russian Academy of Sciences, for providing facilities for recording and processing XPS spectra.

Funding

The study was supported by the Russian Science Foundation (project no. 18-19-00075)

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Authors and Affiliations

  1. Institute of Solid State Chemistry and Mechanochemistry, Siberian Branch of the Russian Academy of Sciences, 630128, Novosibirsk, Russia

    V. V. Lozanov & N. I. Baklanova

  2. Nikolaev Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences, 630090, Novosibirsk, Russia

    I. Yu. Il’in, N. B. Morozova & S. V. Trubin

Authors
  1. V. V. Lozanov
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  2. I. Yu. Il’in
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  3. N. B. Morozova
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  4. S. V. Trubin
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  5. N. I. Baklanova
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Corresponding author

Correspondence to V. V. Lozanov.

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Translated by O. Fedorova

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Lozanov, V.V., Il’in, I.Y., Morozova, N.B. et al. Chemical Vapor Deposition of an Iridium Phase on Hafnium Carbide and Tantalum Carbide. Russ. J. Inorg. Chem. 65, 1781–1788 (2020). https://doi.org/10.1134/S0036023620110108

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