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Growth and Characterization of ZnO and Al-Doped ZnO Thin Films by a Homemade Spray Pyrolysis

  • SURFACES, INTERFACES, AND THIN FILMS
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Abstract

In this work, we have prepared the undoped and Al-doped ZnO thin films by a homemade spray pyrolysis method at 450°C onto glass substrates. The X-ray diffraction patterns of undoped ZnO and aluminized zinc-oxide (AZO) thin films exhibit hexagonal wurtzite crystal structure with high crystalline quality, the crystallite size is nanometric. The morphology of the undoped and Al-doped ZnO thin films also indicate that all samples have a nanoscale grain size around 50 nm, and the microstructure of ZnO films is highly influenced by the aluminum doping. The two films are characterized by UV-visible spectrophotometry showing that the films have a whole optical transmission above 85% in the visible range. The composition of our films is obtained by energy dispersive spectrum, confirmed by Auger electron spectroscopy (AES) and by Rutherford back-scattering spectrometry (RBS) techniques.

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Correspondence to Y. Larbah.

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Larbah, Y., Adnane, M. & Rahal, B. Growth and Characterization of ZnO and Al-Doped ZnO Thin Films by a Homemade Spray Pyrolysis. Semiconductors 54, 1439–1444 (2020). https://doi.org/10.1134/S1063782620110184

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  • DOI: https://doi.org/10.1134/S1063782620110184

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