Abstract
In this work, we have prepared the undoped and Al-doped ZnO thin films by a homemade spray pyrolysis method at 450°C onto glass substrates. The X-ray diffraction patterns of undoped ZnO and aluminized zinc-oxide (AZO) thin films exhibit hexagonal wurtzite crystal structure with high crystalline quality, the crystallite size is nanometric. The morphology of the undoped and Al-doped ZnO thin films also indicate that all samples have a nanoscale grain size around 50 nm, and the microstructure of ZnO films is highly influenced by the aluminum doping. The two films are characterized by UV-visible spectrophotometry showing that the films have a whole optical transmission above 85% in the visible range. The composition of our films is obtained by energy dispersive spectrum, confirmed by Auger electron spectroscopy (AES) and by Rutherford back-scattering spectrometry (RBS) techniques.
Similar content being viewed by others
REFERENCES
D. Kim, I. Yun, and H. Kim, Curr. Appl. Phys. 10, 459 (2010).
Y. Bakha, K. M. Bendimerad, and S. Hamzaoui, Eur. Phys. J. Appl. Phys. 55, 30103 (2011).
D. Song, Appl. Surf. Sci. 254, 4171 (2008).
A. A. Hanna, S. M. A. Mousa, M. A. Sherief, and G. M. Elkomy, J. Am. Sci. 6, 296 (2010).
M. Bouderbala, S. Hamzaoui, A. B. Stambouli, and H. Bouziane, Appl. Energy 64, 89 (1999).
M. Purica, E. Budianu, E. Rusu, M. Danila, and R. Gavrila, Thin Solid Films 403–404, 485 (2002).
M. Sahal, B. Hartiti, A. Ridah, M. Mollar, and B. Marí, Microelectron. J. 39, 1425 (2008).
C. E. Benouis, M. Benhaliliba, A. Sanchez-Juarez, M. S. Aida, F. Chami, and F. Yakuphanoglu, J. Alloys Compd. 490, 62 (2010).
D. C. Altamirano-Juárez, G. Torres-Delgado, S. Jiménez-Sandoval, O. Jiménez-Sandoval, and R. Castanedo-Pérez, Sol. Energy Mater. Sol. Cells 82, 35 (2004).
M. N. Kamalasanan and S. Chandra, Thin Solid Films 288, 112 (1996).
X. Zi-Qiang, D. Hong, L. Yan, and C. Hang, Mater. Sci. Semicond. Process. 9, 132 (2006).
M. A. Kaid and A. Ashour, Appl. Surf. Sci. 253, 3029 (2007).
P. Scherrer, Nachr. Ges. Wiss. Göttingen 26 (9), 98 (1918).
A. Ashour, M. A. Kaid, N. Z. El-Sayed, and A. A. Ibrahim, Appl. Surf. Sci. 252, 7844 (2006).
M. de la L. Olvera, A. Maldonado, J. Vega-Pérez, and O. Solorza-Feria, Mater. Sci. Eng. B 174, 42 (2010).
P. W. Palmberg, Appl. Phys. Lett. 13, 183 (1968).
L. E. Davis, N. C. MacDonald, P. W. Palmberg, G. E. Riach, and R. E. Weber, Handbook of Auger Electron Spectroscopy.Physical Electronics (Eden Prairie, Minnesota, 1978).
Author information
Authors and Affiliations
Corresponding author
Ethics declarations
The authors declare that they have no conflict of interest.
Rights and permissions
About this article
Cite this article
Larbah, Y., Adnane, M. & Rahal, B. Growth and Characterization of ZnO and Al-Doped ZnO Thin Films by a Homemade Spray Pyrolysis. Semiconductors 54, 1439–1444 (2020). https://doi.org/10.1134/S1063782620110184
Received:
Revised:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S1063782620110184