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Analysis and Evaluation the Effect of Electrode Films on the SAW Torque Sensitivity

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Abstract

The surface acoustic wave (SAW) sensor has been widely used to measure torque, and the temperature effect on torque sensitivity has been taken into account. However, few studies have been devoted to the influence of electrode on the torque sensitivity. In order to design a SAW torque sensor with high performance, it is necessary to analyze the effect of electrode. We adopt the Mindlin’s thin plate equations as a boundary condition due to the electrode, propose a method to evaluate the effect of electrode and make a comparison between our calculation and experimental results. Then, we obtain the frequency shifts with different electrode materials when the applied torque is zero. Finally, we evaluate the torque sensitivity with the effect of electrode and obtain the result with the errors about 1.7 and 7.6% compared with experimental data. The errors have been improved greatly with respect to the calculation ignoring electrode effect, about 30%. However, the analysis is valid only under the condition that the thickness of electrode is relatively small, which is satisfied in the general conditions.

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Funding

This work was supported by the Natural Science Foundation of China, under Grant nos. 51705326 and 51475306.

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Authors and Affiliations

  1. School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, 200093, Shanghai, China

    Yanping Fan & Yajun Liu

  2. School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, 200240, Shanghai, China

    Qiang Xiao, Xiaoxin Ma & Xiaojun Ji

  3. Institute of Machinery Manufacturing Technology, China Academy of Engineering Physics, 621900, Mianyang, China

    Pengfei Sun

Authors
  1. Yanping Fan
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  2. Yajun Liu
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  3. Qiang Xiao
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  4. Xiaoxin Ma
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  5. Pengfei Sun
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  6. Xiaojun Ji
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Correspondence to Yanping Fan.

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Yanping Fan, Liu, Y., Xiao, Q. et al. Analysis and Evaluation the Effect of Electrode Films on the SAW Torque Sensitivity. Acoust. Phys. 66, 16–20 (2020). https://doi.org/10.1134/S1063771020010042

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  • DOI: https://doi.org/10.1134/S1063771020010042

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